JPS5728305A - Method of producing tantalum thin film resistor - Google Patents

Method of producing tantalum thin film resistor

Info

Publication number
JPS5728305A
JPS5728305A JP10348180A JP10348180A JPS5728305A JP S5728305 A JPS5728305 A JP S5728305A JP 10348180 A JP10348180 A JP 10348180A JP 10348180 A JP10348180 A JP 10348180A JP S5728305 A JPS5728305 A JP S5728305A
Authority
JP
Japan
Prior art keywords
thin film
film resistor
tantalum thin
producing tantalum
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10348180A
Other languages
Japanese (ja)
Inventor
Yasushi Suda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP10348180A priority Critical patent/JPS5728305A/en
Publication of JPS5728305A publication Critical patent/JPS5728305A/en
Pending legal-status Critical Current

Links

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
JP10348180A 1980-07-28 1980-07-28 Method of producing tantalum thin film resistor Pending JPS5728305A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10348180A JPS5728305A (en) 1980-07-28 1980-07-28 Method of producing tantalum thin film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10348180A JPS5728305A (en) 1980-07-28 1980-07-28 Method of producing tantalum thin film resistor

Publications (1)

Publication Number Publication Date
JPS5728305A true JPS5728305A (en) 1982-02-16

Family

ID=14355195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10348180A Pending JPS5728305A (en) 1980-07-28 1980-07-28 Method of producing tantalum thin film resistor

Country Status (1)

Country Link
JP (1) JPS5728305A (en)

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