JPS5729877B2 - - Google Patents

Info

Publication number
JPS5729877B2
JPS5729877B2 JP12628072A JP12628072A JPS5729877B2 JP S5729877 B2 JPS5729877 B2 JP S5729877B2 JP 12628072 A JP12628072 A JP 12628072A JP 12628072 A JP12628072 A JP 12628072A JP S5729877 B2 JPS5729877 B2 JP S5729877B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12628072A
Other languages
Japanese (ja)
Other versions
JPS4982967A (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12628072A priority Critical patent/JPS5729877B2/ja
Publication of JPS4982967A publication Critical patent/JPS4982967A/ja
Publication of JPS5729877B2 publication Critical patent/JPS5729877B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP12628072A 1972-12-18 1972-12-18 Expired JPS5729877B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12628072A JPS5729877B2 (fr) 1972-12-18 1972-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12628072A JPS5729877B2 (fr) 1972-12-18 1972-12-18

Publications (2)

Publication Number Publication Date
JPS4982967A JPS4982967A (fr) 1974-08-09
JPS5729877B2 true JPS5729877B2 (fr) 1982-06-25

Family

ID=14931290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12628072A Expired JPS5729877B2 (fr) 1972-12-18 1972-12-18

Country Status (1)

Country Link
JP (1) JPS5729877B2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01162908A (ja) * 1987-12-19 1989-06-27 Toshiba Corp 人検知センサ付機器の運転制御装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY151553A (en) 2009-08-18 2014-06-13 Multitest Elektronische Syst Two abutting sections of an align fixture together floatingly engaging an electronic component
MY152434A (en) 2009-08-18 2014-09-30 Multitest Elektronische Syst System for post-processing of electronic components
MY160276A (en) 2009-08-18 2017-02-28 Multitest Elektronische Systeme Gmbh An elastic unit as a separate elastic member to be mounted at an elastic unit receiving section of an align fixture
MY152834A (en) * 2009-08-18 2014-11-28 Multitest Elektronische Syst An elastic unit for clamping an electronic component and extending below an electronic component receiving volume of an align fixture
JP5818711B2 (ja) * 2012-02-14 2015-11-18 三菱電機株式会社 ウェハ保持構造およびそれを備えた蒸着装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01162908A (ja) * 1987-12-19 1989-06-27 Toshiba Corp 人検知センサ付機器の運転制御装置

Also Published As

Publication number Publication date
JPS4982967A (fr) 1974-08-09

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