JPS5729877B2 - - Google Patents
Info
- Publication number
- JPS5729877B2 JPS5729877B2 JP12628072A JP12628072A JPS5729877B2 JP S5729877 B2 JPS5729877 B2 JP S5729877B2 JP 12628072 A JP12628072 A JP 12628072A JP 12628072 A JP12628072 A JP 12628072A JP S5729877 B2 JPS5729877 B2 JP S5729877B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12628072A JPS5729877B2 (fr) | 1972-12-18 | 1972-12-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12628072A JPS5729877B2 (fr) | 1972-12-18 | 1972-12-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4982967A JPS4982967A (fr) | 1974-08-09 |
JPS5729877B2 true JPS5729877B2 (fr) | 1982-06-25 |
Family
ID=14931290
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12628072A Expired JPS5729877B2 (fr) | 1972-12-18 | 1972-12-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5729877B2 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01162908A (ja) * | 1987-12-19 | 1989-06-27 | Toshiba Corp | 人検知センサ付機器の運転制御装置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MY151553A (en) | 2009-08-18 | 2014-06-13 | Multitest Elektronische Syst | Two abutting sections of an align fixture together floatingly engaging an electronic component |
MY152434A (en) | 2009-08-18 | 2014-09-30 | Multitest Elektronische Syst | System for post-processing of electronic components |
MY160276A (en) | 2009-08-18 | 2017-02-28 | Multitest Elektronische Systeme Gmbh | An elastic unit as a separate elastic member to be mounted at an elastic unit receiving section of an align fixture |
MY152834A (en) * | 2009-08-18 | 2014-11-28 | Multitest Elektronische Syst | An elastic unit for clamping an electronic component and extending below an electronic component receiving volume of an align fixture |
JP5818711B2 (ja) * | 2012-02-14 | 2015-11-18 | 三菱電機株式会社 | ウェハ保持構造およびそれを備えた蒸着装置 |
-
1972
- 1972-12-18 JP JP12628072A patent/JPS5729877B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01162908A (ja) * | 1987-12-19 | 1989-06-27 | Toshiba Corp | 人検知センサ付機器の運転制御装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS4982967A (fr) | 1974-08-09 |