JPS5729139U - - Google Patents
Info
- Publication number
- JPS5729139U JPS5729139U JP6157481U JP6157481U JPS5729139U JP S5729139 U JPS5729139 U JP S5729139U JP 6157481 U JP6157481 U JP 6157481U JP 6157481 U JP6157481 U JP 6157481U JP S5729139 U JPS5729139 U JP S5729139U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6157481U JPS5729139U (enExample) | 1981-04-30 | 1981-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6157481U JPS5729139U (enExample) | 1981-04-30 | 1981-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5729139U true JPS5729139U (enExample) | 1982-02-16 |
Family
ID=29434949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6157481U Pending JPS5729139U (enExample) | 1981-04-30 | 1981-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5729139U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007512694A (ja) * | 2003-11-28 | 2007-05-17 | ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | マスク位置調節装置における直接的アライメント |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52136577A (en) * | 1976-05-11 | 1977-11-15 | Nippon Chemical Ind | Aligning device |
-
1981
- 1981-04-30 JP JP6157481U patent/JPS5729139U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52136577A (en) * | 1976-05-11 | 1977-11-15 | Nippon Chemical Ind | Aligning device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007512694A (ja) * | 2003-11-28 | 2007-05-17 | ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | マスク位置調節装置における直接的アライメント |