JPS5729139U - - Google Patents

Info

Publication number
JPS5729139U
JPS5729139U JP6157481U JP6157481U JPS5729139U JP S5729139 U JPS5729139 U JP S5729139U JP 6157481 U JP6157481 U JP 6157481U JP 6157481 U JP6157481 U JP 6157481U JP S5729139 U JPS5729139 U JP S5729139U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6157481U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6157481U priority Critical patent/JPS5729139U/ja
Publication of JPS5729139U publication Critical patent/JPS5729139U/ja
Pending legal-status Critical Current

Links

JP6157481U 1981-04-30 1981-04-30 Pending JPS5729139U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6157481U JPS5729139U (de) 1981-04-30 1981-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6157481U JPS5729139U (de) 1981-04-30 1981-04-30

Publications (1)

Publication Number Publication Date
JPS5729139U true JPS5729139U (de) 1982-02-16

Family

ID=29434949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6157481U Pending JPS5729139U (de) 1981-04-30 1981-04-30

Country Status (1)

Country Link
JP (1) JPS5729139U (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007512694A (ja) * 2003-11-28 2007-05-17 ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング マスク位置調節装置における直接的アライメント

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52136577A (en) * 1976-05-11 1977-11-15 Nippon Chemical Ind Aligning device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52136577A (en) * 1976-05-11 1977-11-15 Nippon Chemical Ind Aligning device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007512694A (ja) * 2003-11-28 2007-05-17 ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング マスク位置調節装置における直接的アライメント

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