JPS5727151Y2 - - Google Patents
Info
- Publication number
- JPS5727151Y2 JPS5727151Y2 JP1978095571U JP9557178U JPS5727151Y2 JP S5727151 Y2 JPS5727151 Y2 JP S5727151Y2 JP 1978095571 U JP1978095571 U JP 1978095571U JP 9557178 U JP9557178 U JP 9557178U JP S5727151 Y2 JPS5727151 Y2 JP S5727151Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978095571U JPS5727151Y2 (OSRAM) | 1978-07-10 | 1978-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978095571U JPS5727151Y2 (OSRAM) | 1978-07-10 | 1978-07-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5512663U JPS5512663U (OSRAM) | 1980-01-26 |
| JPS5727151Y2 true JPS5727151Y2 (OSRAM) | 1982-06-14 |
Family
ID=29028634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978095571U Expired JPS5727151Y2 (OSRAM) | 1978-07-10 | 1978-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5727151Y2 (OSRAM) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5258480A (en) * | 1975-11-10 | 1977-05-13 | Hitachi Ltd | Wafer pick-up device |
| JPS5277657U (OSRAM) * | 1975-12-09 | 1977-06-09 |
-
1978
- 1978-07-10 JP JP1978095571U patent/JPS5727151Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5512663U (OSRAM) | 1980-01-26 |