JPS5727076B2 - - Google Patents
Info
- Publication number
- JPS5727076B2 JPS5727076B2 JP10764677A JP10764677A JPS5727076B2 JP S5727076 B2 JPS5727076 B2 JP S5727076B2 JP 10764677 A JP10764677 A JP 10764677A JP 10764677 A JP10764677 A JP 10764677A JP S5727076 B2 JPS5727076 B2 JP S5727076B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10764677A JPS5441280A (en) | 1977-09-07 | 1977-09-07 | Manufacturing apparatus for single crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10764677A JPS5441280A (en) | 1977-09-07 | 1977-09-07 | Manufacturing apparatus for single crystal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5441280A JPS5441280A (en) | 1979-04-02 |
| JPS5727076B2 true JPS5727076B2 (en) | 1982-06-08 |
Family
ID=14464456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10764677A Granted JPS5441280A (en) | 1977-09-07 | 1977-09-07 | Manufacturing apparatus for single crystal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5441280A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05117075A (en) * | 1991-08-30 | 1993-05-14 | Komatsu Electron Metals Co Ltd | Apparatus for pulling up single crystal and pull-up method |
| JP4730937B2 (en) * | 2004-12-13 | 2011-07-20 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | Semiconductor single crystal manufacturing apparatus and manufacturing method |
| US10378121B2 (en) | 2015-11-24 | 2019-08-13 | Globalwafers Co., Ltd. | Crystal pulling system and method for inhibiting precipitate build-up in exhaust flow path |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5376177A (en) * | 1976-12-15 | 1978-07-06 | Western Electric Co | Method and apparatus for growing crystal |
-
1977
- 1977-09-07 JP JP10764677A patent/JPS5441280A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5376177A (en) * | 1976-12-15 | 1978-07-06 | Western Electric Co | Method and apparatus for growing crystal |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5441280A (en) | 1979-04-02 |