Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filedfiledCritical
Priority to JP10060280UpriorityCriticalpatent/JPS5918023Y2/ja
Publication of JPS5727035UpublicationCriticalpatent/JPS5727035U/ja
Application grantedgrantedCritical
Publication of JPS5918023Y2publicationCriticalpatent/JPS5918023Y2/ja
The Trustees Of Columbia University In The City Of New York
Processes and systems for laser crystallization processing of film regions on a substrate utilizing a line-type beam, and structures of such film regions
The Trustees Of Columbia University In The City Of New York
Processes and systems for laser crystallization processing of film regions on a substrate utilizing a line-type beam, and structures of such film regions