JPS5726406B2 - - Google Patents

Info

Publication number
JPS5726406B2
JPS5726406B2 JP15918676A JP15918676A JPS5726406B2 JP S5726406 B2 JPS5726406 B2 JP S5726406B2 JP 15918676 A JP15918676 A JP 15918676A JP 15918676 A JP15918676 A JP 15918676A JP S5726406 B2 JPS5726406 B2 JP S5726406B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15918676A
Other languages
Japanese (ja)
Other versions
JPS5383468A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15918676A priority Critical patent/JPS5383468A/ja
Publication of JPS5383468A publication Critical patent/JPS5383468A/ja
Publication of JPS5726406B2 publication Critical patent/JPS5726406B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP15918676A 1976-12-28 1976-12-28 Mask aligning method Granted JPS5383468A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15918676A JPS5383468A (en) 1976-12-28 1976-12-28 Mask aligning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15918676A JPS5383468A (en) 1976-12-28 1976-12-28 Mask aligning method

Publications (2)

Publication Number Publication Date
JPS5383468A JPS5383468A (en) 1978-07-22
JPS5726406B2 true JPS5726406B2 (enrdf_load_html_response) 1982-06-04

Family

ID=15688182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15918676A Granted JPS5383468A (en) 1976-12-28 1976-12-28 Mask aligning method

Country Status (1)

Country Link
JP (1) JPS5383468A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6900463B1 (en) 1980-06-30 2005-05-31 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device

Also Published As

Publication number Publication date
JPS5383468A (en) 1978-07-22

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