JPS5723965U - - Google Patents
Info
- Publication number
- JPS5723965U JPS5723965U JP1981093042U JP9304281U JPS5723965U JP S5723965 U JPS5723965 U JP S5723965U JP 1981093042 U JP1981093042 U JP 1981093042U JP 9304281 U JP9304281 U JP 9304281U JP S5723965 U JPS5723965 U JP S5723965U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981093042U JPS6234689Y2 (https=) | 1981-06-25 | 1981-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981093042U JPS6234689Y2 (https=) | 1981-06-25 | 1981-06-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5723965U true JPS5723965U (https=) | 1982-02-06 |
| JPS6234689Y2 JPS6234689Y2 (https=) | 1987-09-03 |
Family
ID=29454989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981093042U Expired JPS6234689Y2 (https=) | 1981-06-25 | 1981-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6234689Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0262040A (ja) * | 1988-08-27 | 1990-03-01 | Nippon Steel Corp | Ｓｉウエハの鏡面加工方法 |
| JPH07164307A (ja) * | 1993-12-14 | 1995-06-27 | Shin Etsu Handotai Co Ltd | 研磨部材およびウエーハ研磨装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100189970B1 (ko) * | 1995-08-07 | 1999-06-01 | 윤종용 | 웨이퍼 연마장치 |
| JP2000288912A (ja) * | 2000-01-01 | 2000-10-17 | Nikon Corp | 研磨ポリシャ及びその製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4862380A (https=) * | 1971-12-06 | 1973-08-31 | ||
| JPS499792A (https=) * | 1972-05-26 | 1974-01-28 |
-
1981
- 1981-06-25 JP JP1981093042U patent/JPS6234689Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4862380A (https=) * | 1971-12-06 | 1973-08-31 | ||
| JPS499792A (https=) * | 1972-05-26 | 1974-01-28 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0262040A (ja) * | 1988-08-27 | 1990-03-01 | Nippon Steel Corp | Ｓｉウエハの鏡面加工方法 |
| JPH07164307A (ja) * | 1993-12-14 | 1995-06-27 | Shin Etsu Handotai Co Ltd | 研磨部材およびウエーハ研磨装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6234689Y2 (https=) | 1987-09-03 |