JPS5721321Y2 - - Google Patents

Info

Publication number
JPS5721321Y2
JPS5721321Y2 JP1975177148U JP17714875U JPS5721321Y2 JP S5721321 Y2 JPS5721321 Y2 JP S5721321Y2 JP 1975177148 U JP1975177148 U JP 1975177148U JP 17714875 U JP17714875 U JP 17714875U JP S5721321 Y2 JPS5721321 Y2 JP S5721321Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975177148U
Other languages
Japanese (ja)
Other versions
JPS5288968U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975177148U priority Critical patent/JPS5721321Y2/ja
Publication of JPS5288968U publication Critical patent/JPS5288968U/ja
Application granted granted Critical
Publication of JPS5721321Y2 publication Critical patent/JPS5721321Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Coating Apparatus (AREA)
  • Weting (AREA)
JP1975177148U 1975-12-26 1975-12-26 Expired JPS5721321Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975177148U JPS5721321Y2 (enrdf_load_stackoverflow) 1975-12-26 1975-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975177148U JPS5721321Y2 (enrdf_load_stackoverflow) 1975-12-26 1975-12-26

Publications (2)

Publication Number Publication Date
JPS5288968U JPS5288968U (enrdf_load_stackoverflow) 1977-07-02
JPS5721321Y2 true JPS5721321Y2 (enrdf_load_stackoverflow) 1982-05-08

Family

ID=28655459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975177148U Expired JPS5721321Y2 (enrdf_load_stackoverflow) 1975-12-26 1975-12-26

Country Status (1)

Country Link
JP (1) JPS5721321Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5813222B2 (ja) * 1978-06-20 1983-03-12 富士プラント工業株式会社 薄板状基板へ均一に被膜を形成する方法および装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018759A (enrdf_load_stackoverflow) * 1973-06-26 1975-02-27
GB1483746A (en) * 1973-12-19 1977-08-24 Monsanto Co Processing of wafers

Also Published As

Publication number Publication date
JPS5288968U (enrdf_load_stackoverflow) 1977-07-02

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