JPS57210554A - Triple-pole type ion pump - Google Patents

Triple-pole type ion pump

Info

Publication number
JPS57210554A
JPS57210554A JP9484781A JP9484781A JPS57210554A JP S57210554 A JPS57210554 A JP S57210554A JP 9484781 A JP9484781 A JP 9484781A JP 9484781 A JP9484781 A JP 9484781A JP S57210554 A JPS57210554 A JP S57210554A
Authority
JP
Japan
Prior art keywords
spatter
matter
cathode
ion pump
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9484781A
Other languages
English (en)
Japanese (ja)
Other versions
JPH024980B2 (enrdf_load_stackoverflow
Inventor
Katsuhiro Kageyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9484781A priority Critical patent/JPS57210554A/ja
Publication of JPS57210554A publication Critical patent/JPS57210554A/ja
Publication of JPH024980B2 publication Critical patent/JPH024980B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)
JP9484781A 1981-06-19 1981-06-19 Triple-pole type ion pump Granted JPS57210554A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9484781A JPS57210554A (en) 1981-06-19 1981-06-19 Triple-pole type ion pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9484781A JPS57210554A (en) 1981-06-19 1981-06-19 Triple-pole type ion pump

Publications (2)

Publication Number Publication Date
JPS57210554A true JPS57210554A (en) 1982-12-24
JPH024980B2 JPH024980B2 (enrdf_load_stackoverflow) 1990-01-31

Family

ID=14121417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9484781A Granted JPS57210554A (en) 1981-06-19 1981-06-19 Triple-pole type ion pump

Country Status (1)

Country Link
JP (1) JPS57210554A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH024980B2 (enrdf_load_stackoverflow) 1990-01-31

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