JPS57209815A - Preparation of high-purity monosilane - Google Patents

Preparation of high-purity monosilane

Info

Publication number
JPS57209815A
JPS57209815A JP9530881A JP9530881A JPS57209815A JP S57209815 A JPS57209815 A JP S57209815A JP 9530881 A JP9530881 A JP 9530881A JP 9530881 A JP9530881 A JP 9530881A JP S57209815 A JPS57209815 A JP S57209815A
Authority
JP
Japan
Prior art keywords
added
monosilane
monohydride
preparation
silicon tetrachloride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9530881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6366769B2 (enrdf_load_stackoverflow
Inventor
Tetsuya Iwao
Reiji Hirai
Yoshinori Ashida
Haruo Saeki
Masao Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP9530881A priority Critical patent/JPS57209815A/ja
Publication of JPS57209815A publication Critical patent/JPS57209815A/ja
Publication of JPS6366769B2 publication Critical patent/JPS6366769B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP9530881A 1981-06-22 1981-06-22 Preparation of high-purity monosilane Granted JPS57209815A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9530881A JPS57209815A (en) 1981-06-22 1981-06-22 Preparation of high-purity monosilane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9530881A JPS57209815A (en) 1981-06-22 1981-06-22 Preparation of high-purity monosilane

Publications (2)

Publication Number Publication Date
JPS57209815A true JPS57209815A (en) 1982-12-23
JPS6366769B2 JPS6366769B2 (enrdf_load_stackoverflow) 1988-12-22

Family

ID=14134126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9530881A Granted JPS57209815A (en) 1981-06-22 1981-06-22 Preparation of high-purity monosilane

Country Status (1)

Country Link
JP (1) JPS57209815A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4542005A (en) * 1981-07-08 1985-09-17 Mitsui Toatsu Chemicals, Inc. Process for preparing silicon hydrides
US4810482A (en) * 1982-12-21 1989-03-07 Mitsui Toatsu Chemicals, Inc. Process for producing silanes

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4542005A (en) * 1981-07-08 1985-09-17 Mitsui Toatsu Chemicals, Inc. Process for preparing silicon hydrides
US4810482A (en) * 1982-12-21 1989-03-07 Mitsui Toatsu Chemicals, Inc. Process for producing silanes

Also Published As

Publication number Publication date
JPS6366769B2 (enrdf_load_stackoverflow) 1988-12-22

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