JPS57207171A - Evaporating source for vapor deposition of selenium type photosensitive layer - Google Patents

Evaporating source for vapor deposition of selenium type photosensitive layer

Info

Publication number
JPS57207171A
JPS57207171A JP9038381A JP9038381A JPS57207171A JP S57207171 A JPS57207171 A JP S57207171A JP 9038381 A JP9038381 A JP 9038381A JP 9038381 A JP9038381 A JP 9038381A JP S57207171 A JPS57207171 A JP S57207171A
Authority
JP
Japan
Prior art keywords
vessel
vapor
evaporating
ports
heaters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9038381A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6116343B2 (enrdf_load_stackoverflow
Inventor
Makoto Miyazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP9038381A priority Critical patent/JPS57207171A/ja
Publication of JPS57207171A publication Critical patent/JPS57207171A/ja
Publication of JPS6116343B2 publication Critical patent/JPS6116343B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Physical Vapour Deposition (AREA)
JP9038381A 1981-06-12 1981-06-12 Evaporating source for vapor deposition of selenium type photosensitive layer Granted JPS57207171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9038381A JPS57207171A (en) 1981-06-12 1981-06-12 Evaporating source for vapor deposition of selenium type photosensitive layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9038381A JPS57207171A (en) 1981-06-12 1981-06-12 Evaporating source for vapor deposition of selenium type photosensitive layer

Publications (2)

Publication Number Publication Date
JPS57207171A true JPS57207171A (en) 1982-12-18
JPS6116343B2 JPS6116343B2 (enrdf_load_stackoverflow) 1986-04-30

Family

ID=13997042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9038381A Granted JPS57207171A (en) 1981-06-12 1981-06-12 Evaporating source for vapor deposition of selenium type photosensitive layer

Country Status (1)

Country Link
JP (1) JPS57207171A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005029895A (ja) * 2003-07-04 2005-02-03 Agfa Gevaert Nv 蒸着装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843941A (enrdf_load_stackoverflow) * 1971-10-07 1973-06-25
JPS55164365U (enrdf_load_stackoverflow) * 1979-05-15 1980-11-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843941A (enrdf_load_stackoverflow) * 1971-10-07 1973-06-25
JPS55164365U (enrdf_load_stackoverflow) * 1979-05-15 1980-11-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005029895A (ja) * 2003-07-04 2005-02-03 Agfa Gevaert Nv 蒸着装置

Also Published As

Publication number Publication date
JPS6116343B2 (enrdf_load_stackoverflow) 1986-04-30

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