JPS57203545U - - Google Patents
Info
- Publication number
- JPS57203545U JPS57203545U JP9152681U JP9152681U JPS57203545U JP S57203545 U JPS57203545 U JP S57203545U JP 9152681 U JP9152681 U JP 9152681U JP 9152681 U JP9152681 U JP 9152681U JP S57203545 U JPS57203545 U JP S57203545U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9152681U JPS57203545U (ja) | 1981-06-19 | 1981-06-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9152681U JPS57203545U (ja) | 1981-06-19 | 1981-06-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57203545U true JPS57203545U (ja) | 1982-12-24 |
Family
ID=29886607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9152681U Pending JPS57203545U (ja) | 1981-06-19 | 1981-06-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57203545U (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60165714A (ja) * | 1984-02-09 | 1985-08-28 | Fujitsu Ltd | 気相成長方法および装置 |
JPS61215289A (ja) * | 1985-03-19 | 1986-09-25 | Toshiba Mach Co Ltd | 気相成長装置 |
JPS61215291A (ja) * | 1985-03-22 | 1986-09-25 | Toshiba Mach Co Ltd | 気相成長装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5271171A (en) * | 1975-12-10 | 1977-06-14 | Matsushita Electronics Corp | Production of epitaxial wafer |
JPS5595700A (en) * | 1979-01-11 | 1980-07-21 | Nec Corp | Vapor phase growing jig |
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1981
- 1981-06-19 JP JP9152681U patent/JPS57203545U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5271171A (en) * | 1975-12-10 | 1977-06-14 | Matsushita Electronics Corp | Production of epitaxial wafer |
JPS5595700A (en) * | 1979-01-11 | 1980-07-21 | Nec Corp | Vapor phase growing jig |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60165714A (ja) * | 1984-02-09 | 1985-08-28 | Fujitsu Ltd | 気相成長方法および装置 |
JPS61215289A (ja) * | 1985-03-19 | 1986-09-25 | Toshiba Mach Co Ltd | 気相成長装置 |
JPS61215291A (ja) * | 1985-03-22 | 1986-09-25 | Toshiba Mach Co Ltd | 気相成長装置 |