JPS57203545U - - Google Patents

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Publication number
JPS57203545U
JPS57203545U JP9152681U JP9152681U JPS57203545U JP S57203545 U JPS57203545 U JP S57203545U JP 9152681 U JP9152681 U JP 9152681U JP 9152681 U JP9152681 U JP 9152681U JP S57203545 U JPS57203545 U JP S57203545U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9152681U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9152681U priority Critical patent/JPS57203545U/ja
Publication of JPS57203545U publication Critical patent/JPS57203545U/ja
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
JP9152681U 1981-06-19 1981-06-19 Pending JPS57203545U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9152681U JPS57203545U (ja) 1981-06-19 1981-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9152681U JPS57203545U (ja) 1981-06-19 1981-06-19

Publications (1)

Publication Number Publication Date
JPS57203545U true JPS57203545U (ja) 1982-12-24

Family

ID=29886607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9152681U Pending JPS57203545U (ja) 1981-06-19 1981-06-19

Country Status (1)

Country Link
JP (1) JPS57203545U (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60165714A (ja) * 1984-02-09 1985-08-28 Fujitsu Ltd 気相成長方法および装置
JPS61215289A (ja) * 1985-03-19 1986-09-25 Toshiba Mach Co Ltd 気相成長装置
JPS61215291A (ja) * 1985-03-22 1986-09-25 Toshiba Mach Co Ltd 気相成長装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271171A (en) * 1975-12-10 1977-06-14 Matsushita Electronics Corp Production of epitaxial wafer
JPS5595700A (en) * 1979-01-11 1980-07-21 Nec Corp Vapor phase growing jig

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271171A (en) * 1975-12-10 1977-06-14 Matsushita Electronics Corp Production of epitaxial wafer
JPS5595700A (en) * 1979-01-11 1980-07-21 Nec Corp Vapor phase growing jig

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60165714A (ja) * 1984-02-09 1985-08-28 Fujitsu Ltd 気相成長方法および装置
JPS61215289A (ja) * 1985-03-19 1986-09-25 Toshiba Mach Co Ltd 気相成長装置
JPS61215291A (ja) * 1985-03-22 1986-09-25 Toshiba Mach Co Ltd 気相成長装置

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