JPS57200030U - - Google Patents

Info

Publication number
JPS57200030U
JPS57200030U JP8920181U JP8920181U JPS57200030U JP S57200030 U JPS57200030 U JP S57200030U JP 8920181 U JP8920181 U JP 8920181U JP 8920181 U JP8920181 U JP 8920181U JP S57200030 U JPS57200030 U JP S57200030U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8920181U
Other languages
Japanese (ja)
Other versions
JPH0138911Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8920181U priority Critical patent/JPH0138911Y2/ja
Publication of JPS57200030U publication Critical patent/JPS57200030U/ja
Application granted granted Critical
Publication of JPH0138911Y2 publication Critical patent/JPH0138911Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP8920181U 1981-06-16 1981-06-16 Expired JPH0138911Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8920181U JPH0138911Y2 (enrdf_load_stackoverflow) 1981-06-16 1981-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8920181U JPH0138911Y2 (enrdf_load_stackoverflow) 1981-06-16 1981-06-16

Publications (2)

Publication Number Publication Date
JPS57200030U true JPS57200030U (enrdf_load_stackoverflow) 1982-12-20
JPH0138911Y2 JPH0138911Y2 (enrdf_load_stackoverflow) 1989-11-21

Family

ID=29884351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8920181U Expired JPH0138911Y2 (enrdf_load_stackoverflow) 1981-06-16 1981-06-16

Country Status (1)

Country Link
JP (1) JPH0138911Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59143328A (ja) * 1983-02-03 1984-08-16 Anelva Corp ドライエツチング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59143328A (ja) * 1983-02-03 1984-08-16 Anelva Corp ドライエツチング装置

Also Published As

Publication number Publication date
JPH0138911Y2 (enrdf_load_stackoverflow) 1989-11-21

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