JPS57198805A - Measurement of film thickness - Google Patents

Measurement of film thickness

Info

Publication number
JPS57198805A
JPS57198805A JP8399981A JP8399981A JPS57198805A JP S57198805 A JPS57198805 A JP S57198805A JP 8399981 A JP8399981 A JP 8399981A JP 8399981 A JP8399981 A JP 8399981A JP S57198805 A JPS57198805 A JP S57198805A
Authority
JP
Japan
Prior art keywords
light
active layer
inp
layer
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8399981A
Other languages
Japanese (ja)
Inventor
Satoshi Furumiya
Akio Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8399981A priority Critical patent/JPS57198805A/en
Publication of JPS57198805A publication Critical patent/JPS57198805A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Abstract

PURPOSE:To provide a handy non-destructive measuring method by measuring the thickness of a semiconductor thin film detecting the intensity of a photoluminescence light. CONSTITUTION:An active layer 1 of InGaAsP is sandwiched between InP layers 2 and 3 to make a double hereto structure. The thickness of the layers 1, 2 and 3 is one parameter for determining the characteristic of an element and greatly affects the laser characteristic. The light with a wavelength of 1.06mu of a YAG laser, which is able to transmit the InP layer 2, can directly excite the active layer 1 of the double hereto structure. In addition, the photoluminescence (PL) light releaed from the active layer 1 can transmit the InP 2 layer. Therefore, with the InP layers 2 and 3 on both sides of the active layer 1 as window, the PL light can be checked directly. It enters a photodetector PD through a half mirror 6 and an induced voltage is displayed on a TV as spectrum.
JP8399981A 1981-06-01 1981-06-01 Measurement of film thickness Pending JPS57198805A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8399981A JPS57198805A (en) 1981-06-01 1981-06-01 Measurement of film thickness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8399981A JPS57198805A (en) 1981-06-01 1981-06-01 Measurement of film thickness

Publications (1)

Publication Number Publication Date
JPS57198805A true JPS57198805A (en) 1982-12-06

Family

ID=13818222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8399981A Pending JPS57198805A (en) 1981-06-01 1981-06-01 Measurement of film thickness

Country Status (1)

Country Link
JP (1) JPS57198805A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61138102A (en) * 1984-12-11 1986-06-25 Kawasaki Steel Corp Method for measuring amount of oil coated on surface of steel plate
CN110567385A (en) * 2019-09-19 2019-12-13 廊坊师范学院 Hyperspectral technology-based construction thickness detection method for building reflective insulation coating

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61138102A (en) * 1984-12-11 1986-06-25 Kawasaki Steel Corp Method for measuring amount of oil coated on surface of steel plate
JPH0418763B2 (en) * 1984-12-11 1992-03-27 Kawasaki Steel Co
CN110567385A (en) * 2019-09-19 2019-12-13 廊坊师范学院 Hyperspectral technology-based construction thickness detection method for building reflective insulation coating

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