JPS5719853B2 - - Google Patents
Info
- Publication number
- JPS5719853B2 JPS5719853B2 JP7229475A JP7229475A JPS5719853B2 JP S5719853 B2 JPS5719853 B2 JP S5719853B2 JP 7229475 A JP7229475 A JP 7229475A JP 7229475 A JP7229475 A JP 7229475A JP S5719853 B2 JPS5719853 B2 JP S5719853B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50072294A JPS51147967A (en) | 1975-06-14 | 1975-06-14 | Method of controlling spot exposure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50072294A JPS51147967A (en) | 1975-06-14 | 1975-06-14 | Method of controlling spot exposure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51147967A JPS51147967A (en) | 1976-12-18 |
JPS5719853B2 true JPS5719853B2 (en) | 1982-04-24 |
Family
ID=13485092
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50072294A Granted JPS51147967A (en) | 1975-06-14 | 1975-06-14 | Method of controlling spot exposure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51147967A (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5429980A (en) * | 1977-08-10 | 1979-03-06 | Hitachi Ltd | Generation system for pattern |
US4147937A (en) * | 1977-11-01 | 1979-04-03 | Fujitsu Limited | Electron beam exposure system method and apparatus |
JPS559433A (en) * | 1978-07-07 | 1980-01-23 | Toshiba Corp | Electron beam exposure device |
JPS5652182Y2 (en) * | 1978-08-26 | 1981-12-05 | ||
JPS5630727A (en) * | 1979-08-22 | 1981-03-27 | Toshiba Corp | Transmission system of exposure data |
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1975
- 1975-06-14 JP JP50072294A patent/JPS51147967A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS51147967A (en) | 1976-12-18 |