JPS5719853B2 - - Google Patents

Info

Publication number
JPS5719853B2
JPS5719853B2 JP7229475A JP7229475A JPS5719853B2 JP S5719853 B2 JPS5719853 B2 JP S5719853B2 JP 7229475 A JP7229475 A JP 7229475A JP 7229475 A JP7229475 A JP 7229475A JP S5719853 B2 JPS5719853 B2 JP S5719853B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7229475A
Other languages
Japanese (ja)
Other versions
JPS51147967A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50072294A priority Critical patent/JPS51147967A/ja
Publication of JPS51147967A publication Critical patent/JPS51147967A/ja
Publication of JPS5719853B2 publication Critical patent/JPS5719853B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP50072294A 1975-06-14 1975-06-14 Method of controlling spot exposure Granted JPS51147967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50072294A JPS51147967A (en) 1975-06-14 1975-06-14 Method of controlling spot exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50072294A JPS51147967A (en) 1975-06-14 1975-06-14 Method of controlling spot exposure

Publications (2)

Publication Number Publication Date
JPS51147967A JPS51147967A (en) 1976-12-18
JPS5719853B2 true JPS5719853B2 (Direct) 1982-04-24

Family

ID=13485092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50072294A Granted JPS51147967A (en) 1975-06-14 1975-06-14 Method of controlling spot exposure

Country Status (1)

Country Link
JP (1) JPS51147967A (Direct)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5429980A (en) * 1977-08-10 1979-03-06 Hitachi Ltd Generation system for pattern
US4147937A (en) * 1977-11-01 1979-04-03 Fujitsu Limited Electron beam exposure system method and apparatus
JPS559433A (en) * 1978-07-07 1980-01-23 Toshiba Corp Electron beam exposure device
JPS5652182Y2 (Direct) * 1978-08-26 1981-12-05
JPS5630727A (en) * 1979-08-22 1981-03-27 Toshiba Corp Transmission system of exposure data

Also Published As

Publication number Publication date
JPS51147967A (en) 1976-12-18

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