JPS57198454A - Formation of picture - Google Patents
Formation of pictureInfo
- Publication number
- JPS57198454A JPS57198454A JP8413481A JP8413481A JPS57198454A JP S57198454 A JPS57198454 A JP S57198454A JP 8413481 A JP8413481 A JP 8413481A JP 8413481 A JP8413481 A JP 8413481A JP S57198454 A JPS57198454 A JP S57198454A
- Authority
- JP
- Japan
- Prior art keywords
- exposed
- picture formation
- formation layer
- pattern
- bridging agent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8413481A JPS57198454A (en) | 1981-05-30 | 1981-05-30 | Formation of picture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8413481A JPS57198454A (en) | 1981-05-30 | 1981-05-30 | Formation of picture |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57198454A true JPS57198454A (en) | 1982-12-06 |
JPH0360111B2 JPH0360111B2 (ja) | 1991-09-12 |
Family
ID=13822023
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8413481A Granted JPS57198454A (en) | 1981-05-30 | 1981-05-30 | Formation of picture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57198454A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59214848A (ja) * | 1983-05-20 | 1984-12-04 | Dainippon Printing Co Ltd | 画像形成材料 |
JP2015001736A (ja) * | 2013-06-13 | 2015-01-05 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | フォトレジスト現像用組成物及びこれを用いたフォトレジストの現像方法 |
-
1981
- 1981-05-30 JP JP8413481A patent/JPS57198454A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59214848A (ja) * | 1983-05-20 | 1984-12-04 | Dainippon Printing Co Ltd | 画像形成材料 |
JPH0466016B2 (ja) * | 1983-05-20 | 1992-10-21 | Dainippon Printing Co Ltd | |
JP2015001736A (ja) * | 2013-06-13 | 2015-01-05 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | フォトレジスト現像用組成物及びこれを用いたフォトレジストの現像方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0360111B2 (ja) | 1991-09-12 |
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