JPS57197637U - - Google Patents

Info

Publication number
JPS57197637U
JPS57197637U JP8633081U JP8633081U JPS57197637U JP S57197637 U JPS57197637 U JP S57197637U JP 8633081 U JP8633081 U JP 8633081U JP 8633081 U JP8633081 U JP 8633081U JP S57197637 U JPS57197637 U JP S57197637U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8633081U
Other languages
Japanese (ja)
Other versions
JPH0328507Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981086330U priority Critical patent/JPH0328507Y2/ja
Publication of JPS57197637U publication Critical patent/JPS57197637U/ja
Application granted granted Critical
Publication of JPH0328507Y2 publication Critical patent/JPH0328507Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1981086330U 1981-06-12 1981-06-12 Expired JPH0328507Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981086330U JPH0328507Y2 (cg-RX-API-DMAC7.html) 1981-06-12 1981-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981086330U JPH0328507Y2 (cg-RX-API-DMAC7.html) 1981-06-12 1981-06-12

Publications (2)

Publication Number Publication Date
JPS57197637U true JPS57197637U (cg-RX-API-DMAC7.html) 1982-12-15
JPH0328507Y2 JPH0328507Y2 (cg-RX-API-DMAC7.html) 1991-06-19

Family

ID=29881554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981086330U Expired JPH0328507Y2 (cg-RX-API-DMAC7.html) 1981-06-12 1981-06-12

Country Status (1)

Country Link
JP (1) JPH0328507Y2 (cg-RX-API-DMAC7.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4968656A (cg-RX-API-DMAC7.html) * 1972-11-06 1974-07-03
JPS54159963A (en) * 1978-06-06 1979-12-18 Shiroyama Kogyo Kk Articulated arm type manipulator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4968656A (cg-RX-API-DMAC7.html) * 1972-11-06 1974-07-03
JPS54159963A (en) * 1978-06-06 1979-12-18 Shiroyama Kogyo Kk Articulated arm type manipulator

Also Published As

Publication number Publication date
JPH0328507Y2 (cg-RX-API-DMAC7.html) 1991-06-19

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