JPS57197444A - Surface polishing method of sample for fluorescent x-ray spectroscopic analysis - Google Patents

Surface polishing method of sample for fluorescent x-ray spectroscopic analysis

Info

Publication number
JPS57197444A
JPS57197444A JP56083173A JP8317381A JPS57197444A JP S57197444 A JPS57197444 A JP S57197444A JP 56083173 A JP56083173 A JP 56083173A JP 8317381 A JP8317381 A JP 8317381A JP S57197444 A JPS57197444 A JP S57197444A
Authority
JP
Japan
Prior art keywords
sample
whetstone
feed
motor
fluorescent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56083173A
Other languages
Japanese (ja)
Inventor
Hideo Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Corp
Original Assignee
Rigaku Industrial Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Industrial Corp filed Critical Rigaku Industrial Corp
Priority to JP56083173A priority Critical patent/JPS57197444A/en
Publication of JPS57197444A publication Critical patent/JPS57197444A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/32—Polishing; Etching

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To polish the surface of a sample high in reproducibility, by pressing a sample to be analyzed, against a whetstone through an energizing means, and polishing the surface of the sample by a reciprocating motion of the whetstone. CONSTITUTION:A whetstone 2 is driven by a motor 1, and a sample feed stand 9 is moved in the X and Y directions by an X-Y feed means. The Y direction of this feed stand 9 is held in parallel with an output shaft of the motor 1, that is to say, the rotating center of the whetstone 2. On the feed stand 9, 3 guide rods 6 are provided, the sample chuck can be moved in the Y direction by being guided by these guide rods 6, and between the chuck 4 and the feed stand 9, plural springs 7 are inserted. The motor 1 is rotated, the sample is brought into abutment on the whetstone 2 by constant pressure, and the sample is brought to a reciprocating motion to the right and left plural times by an X direction feed handle, by which polishing is finished.
JP56083173A 1981-05-29 1981-05-29 Surface polishing method of sample for fluorescent x-ray spectroscopic analysis Pending JPS57197444A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56083173A JPS57197444A (en) 1981-05-29 1981-05-29 Surface polishing method of sample for fluorescent x-ray spectroscopic analysis

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56083173A JPS57197444A (en) 1981-05-29 1981-05-29 Surface polishing method of sample for fluorescent x-ray spectroscopic analysis

Publications (1)

Publication Number Publication Date
JPS57197444A true JPS57197444A (en) 1982-12-03

Family

ID=13794884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56083173A Pending JPS57197444A (en) 1981-05-29 1981-05-29 Surface polishing method of sample for fluorescent x-ray spectroscopic analysis

Country Status (1)

Country Link
JP (1) JPS57197444A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60129650A (en) * 1983-12-16 1985-07-10 Anelva Corp Analysis of insulator by electron spectro analysis method
JPS61212748A (en) * 1985-03-18 1986-09-20 Mitsubishi Heavy Ind Ltd Method and apparatus for forming inspection surface
CN103454134A (en) * 2013-09-18 2013-12-18 核工业理化工程研究院 Sample polishing subsidiary harness adopting gear and rack
CN104625947A (en) * 2015-01-30 2015-05-20 武汉新芯集成电路制造有限公司 Chip fixing device and preparation method for invalid analysis sample

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4947279U (en) * 1972-07-26 1974-04-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4947279U (en) * 1972-07-26 1974-04-25

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60129650A (en) * 1983-12-16 1985-07-10 Anelva Corp Analysis of insulator by electron spectro analysis method
JPS61212748A (en) * 1985-03-18 1986-09-20 Mitsubishi Heavy Ind Ltd Method and apparatus for forming inspection surface
CN103454134A (en) * 2013-09-18 2013-12-18 核工业理化工程研究院 Sample polishing subsidiary harness adopting gear and rack
CN104625947A (en) * 2015-01-30 2015-05-20 武汉新芯集成电路制造有限公司 Chip fixing device and preparation method for invalid analysis sample

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