JPS57196854U - - Google Patents

Info

Publication number
JPS57196854U
JPS57196854U JP8428181U JP8428181U JPS57196854U JP S57196854 U JPS57196854 U JP S57196854U JP 8428181 U JP8428181 U JP 8428181U JP 8428181 U JP8428181 U JP 8428181U JP S57196854 U JPS57196854 U JP S57196854U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8428181U
Other languages
Japanese (ja)
Other versions
JPS6224131Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8428181U priority Critical patent/JPS6224131Y2/ja
Publication of JPS57196854U publication Critical patent/JPS57196854U/ja
Application granted granted Critical
Publication of JPS6224131Y2 publication Critical patent/JPS6224131Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Pressure Vessels And Lids Thereof (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP8428181U 1981-06-10 1981-06-10 Expired JPS6224131Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8428181U JPS6224131Y2 (enrdf_load_stackoverflow) 1981-06-10 1981-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8428181U JPS6224131Y2 (enrdf_load_stackoverflow) 1981-06-10 1981-06-10

Publications (2)

Publication Number Publication Date
JPS57196854U true JPS57196854U (enrdf_load_stackoverflow) 1982-12-14
JPS6224131Y2 JPS6224131Y2 (enrdf_load_stackoverflow) 1987-06-19

Family

ID=29879650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8428181U Expired JPS6224131Y2 (enrdf_load_stackoverflow) 1981-06-10 1981-06-10

Country Status (1)

Country Link
JP (1) JPS6224131Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023166653A1 (ja) * 2022-03-03 2023-09-07 キヤノンアネルバ株式会社 真空処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023166653A1 (ja) * 2022-03-03 2023-09-07 キヤノンアネルバ株式会社 真空処理装置

Also Published As

Publication number Publication date
JPS6224131Y2 (enrdf_load_stackoverflow) 1987-06-19

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