JPS5719473B2 - - Google Patents

Info

Publication number
JPS5719473B2
JPS5719473B2 JP15464376A JP15464376A JPS5719473B2 JP S5719473 B2 JPS5719473 B2 JP S5719473B2 JP 15464376 A JP15464376 A JP 15464376A JP 15464376 A JP15464376 A JP 15464376A JP S5719473 B2 JPS5719473 B2 JP S5719473B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15464376A
Other languages
Japanese (ja)
Other versions
JPS5378125A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15464376A priority Critical patent/JPS5378125A/ja
Publication of JPS5378125A publication Critical patent/JPS5378125A/ja
Publication of JPS5719473B2 publication Critical patent/JPS5719473B2/ja
Granted legal-status Critical Current

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JP15464376A 1976-12-22 1976-12-22 Pick up unit for pattern precognized information Granted JPS5378125A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15464376A JPS5378125A (en) 1976-12-22 1976-12-22 Pick up unit for pattern precognized information

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15464376A JPS5378125A (en) 1976-12-22 1976-12-22 Pick up unit for pattern precognized information

Publications (2)

Publication Number Publication Date
JPS5378125A JPS5378125A (en) 1978-07-11
JPS5719473B2 true JPS5719473B2 (ko) 1982-04-22

Family

ID=15588691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15464376A Granted JPS5378125A (en) 1976-12-22 1976-12-22 Pick up unit for pattern precognized information

Country Status (1)

Country Link
JP (1) JPS5378125A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11402313B2 (en) 2016-01-21 2022-08-02 Tokyo Electron Limited Foreign substance detection device and foreign substance detection method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11402313B2 (en) 2016-01-21 2022-08-02 Tokyo Electron Limited Foreign substance detection device and foreign substance detection method

Also Published As

Publication number Publication date
JPS5378125A (en) 1978-07-11

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