JPS5378125A - Pick up unit for pattern precognized information - Google Patents

Pick up unit for pattern precognized information

Info

Publication number
JPS5378125A
JPS5378125A JP15464376A JP15464376A JPS5378125A JP S5378125 A JPS5378125 A JP S5378125A JP 15464376 A JP15464376 A JP 15464376A JP 15464376 A JP15464376 A JP 15464376A JP S5378125 A JPS5378125 A JP S5378125A
Authority
JP
Japan
Prior art keywords
precognized
pick
pattern
information
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15464376A
Other languages
Japanese (ja)
Other versions
JPS5719473B2 (en
Inventor
Masumi Yoshida
Kiyoshi Iwata
Eiichiro Yamamoto
Takeshi Masui
Shinichi Shimizu
Yukikazu Kaburayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15464376A priority Critical patent/JPS5378125A/en
Publication of JPS5378125A publication Critical patent/JPS5378125A/en
Publication of JPS5719473B2 publication Critical patent/JPS5719473B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To enable the recognition correctly even with a little distortion for the graph added by means of core line processing, by obtaining the recognized information whether the depth of profile is changed or not through the checking of line along the profile of the graph of recognized object.
COPYRIGHT: (C)1978,JPO&Japio
JP15464376A 1976-12-22 1976-12-22 Pick up unit for pattern precognized information Granted JPS5378125A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15464376A JPS5378125A (en) 1976-12-22 1976-12-22 Pick up unit for pattern precognized information

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15464376A JPS5378125A (en) 1976-12-22 1976-12-22 Pick up unit for pattern precognized information

Publications (2)

Publication Number Publication Date
JPS5378125A true JPS5378125A (en) 1978-07-11
JPS5719473B2 JPS5719473B2 (en) 1982-04-22

Family

ID=15588691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15464376A Granted JPS5378125A (en) 1976-12-22 1976-12-22 Pick up unit for pattern precognized information

Country Status (1)

Country Link
JP (1) JPS5378125A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102619157B1 (en) 2016-01-21 2023-12-28 도쿄엘렉트론가부시키가이샤 Chemical liquid supply apparatus and coating and developing system

Also Published As

Publication number Publication date
JPS5719473B2 (en) 1982-04-22

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