JPS5719473B2 - - Google Patents
Info
- Publication number
- JPS5719473B2 JPS5719473B2 JP15464376A JP15464376A JPS5719473B2 JP S5719473 B2 JPS5719473 B2 JP S5719473B2 JP 15464376 A JP15464376 A JP 15464376A JP 15464376 A JP15464376 A JP 15464376A JP S5719473 B2 JPS5719473 B2 JP S5719473B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Character Discrimination (AREA)
- Image Analysis (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15464376A JPS5378125A (en) | 1976-12-22 | 1976-12-22 | Pick up unit for pattern precognized information |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15464376A JPS5378125A (en) | 1976-12-22 | 1976-12-22 | Pick up unit for pattern precognized information |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5378125A JPS5378125A (en) | 1978-07-11 |
JPS5719473B2 true JPS5719473B2 ( ) | 1982-04-22 |
Family
ID=15588691
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15464376A Granted JPS5378125A (en) | 1976-12-22 | 1976-12-22 | Pick up unit for pattern precognized information |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5378125A ( ) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11402313B2 (en) | 2016-01-21 | 2022-08-02 | Tokyo Electron Limited | Foreign substance detection device and foreign substance detection method |
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1976
- 1976-12-22 JP JP15464376A patent/JPS5378125A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11402313B2 (en) | 2016-01-21 | 2022-08-02 | Tokyo Electron Limited | Foreign substance detection device and foreign substance detection method |
Also Published As
Publication number | Publication date |
---|---|
JPS5378125A (en) | 1978-07-11 |