JPS57194251A - Heating method for electrical heating type evaporating source - Google Patents

Heating method for electrical heating type evaporating source

Info

Publication number
JPS57194251A
JPS57194251A JP7825081A JP7825081A JPS57194251A JP S57194251 A JPS57194251 A JP S57194251A JP 7825081 A JP7825081 A JP 7825081A JP 7825081 A JP7825081 A JP 7825081A JP S57194251 A JPS57194251 A JP S57194251A
Authority
JP
Japan
Prior art keywords
source
holders
evaporating source
conductive materials
joints
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7825081A
Other languages
Japanese (ja)
Other versions
JPS5848628B2 (en
Inventor
Yoshioki Yokoyama
Sadao Kuriyama
Toshihiko Sugimoto
Shozo Kawazoe
Kenji Nonomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Nitto Denko Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Nitto Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK, Nitto Electric Industrial Co Ltd filed Critical Shimadzu Corp
Priority to JP7825081A priority Critical patent/JPS5848628B2/en
Publication of JPS57194251A publication Critical patent/JPS57194251A/en
Publication of JPS5848628B2 publication Critical patent/JPS5848628B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To heat an evaporating source smoothly without defective contact and failure by disposing conductive materials near the joints between the outside surfaces in the end parts of the evaporating source and the inside surfaces in the engaging recesses of holders made of conductive materials and melting these by the heat evolved when the conduction of electricity is started. CONSTITUTION:Holders 3, 4 made of conductive materials are disposed on stationary electrodes 1, 2 and an electrical heating type evaporating source 5 is installed between the holders 3 and 4. Both end parts of the source 5 are loosely fitted into the engaging recesses 3a, 4a provided on the top surfaces of the holders 3, 4. Conductive materials 8- are disposed near the joints 9 between the outside surfaces in the end parts of the source 5 and the inside surfaces of the recesses 3a, 4a. Conduction of electricity to the evaporating source is started by applying a voltage between the electrodes 1 and 2, and the materials 8- are melted by the heat evolved locally in the joints 9 and are allowed to flow into the parts 9. Therefore, the defective contact of the joint parts is eliminated and the failure of the source 5 and the holders 3, 4 during heating is eliminated by the loose fitting.
JP7825081A 1981-05-23 1981-05-23 How to raise the temperature of an energized heat-generating evaporation source Expired JPS5848628B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7825081A JPS5848628B2 (en) 1981-05-23 1981-05-23 How to raise the temperature of an energized heat-generating evaporation source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7825081A JPS5848628B2 (en) 1981-05-23 1981-05-23 How to raise the temperature of an energized heat-generating evaporation source

Publications (2)

Publication Number Publication Date
JPS57194251A true JPS57194251A (en) 1982-11-29
JPS5848628B2 JPS5848628B2 (en) 1983-10-29

Family

ID=13656747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7825081A Expired JPS5848628B2 (en) 1981-05-23 1981-05-23 How to raise the temperature of an energized heat-generating evaporation source

Country Status (1)

Country Link
JP (1) JPS5848628B2 (en)

Also Published As

Publication number Publication date
JPS5848628B2 (en) 1983-10-29

Similar Documents

Publication Publication Date Title
DE3382551D1 (en) CONNECTOR WITH MELTING INSERT AND INTERNAL TEMPERATURE CONTROL.
ATE50850T1 (en) ELECTRICALLY WELDING SLEEVE.
EP0177340A3 (en) Improved apparatus for electrically isolated hot wire surfacing processes
EP0139854A3 (en) Composite structural member
GB8410672D0 (en) Recoverable article
SE8903576D0 (en) PAPER SUBSTANCE FILM WITH METAL GRILL INSERT INTENDED FOR COMBINED WELDING FOOTWEAR
NO159839C (en) PROCEDURE TO CONNECT A JOINT PIECE OF LL WITH A METAL PLATE BY WELDING.
JPS57194251A (en) Heating method for electrical heating type evaporating source
EP0389625A4 (en) Process for resistance diffusion junction.
EP0503094A4 (en) Method of electrically joining objects to be joined including ceramics
EP0081339A3 (en) Sealing of electrochemical cells
JPS6418583A (en) Method for welding al plate or the like
JPS57192908A (en) Fixing method for soldering
JPS6462286A (en) Resistance welding method for steel sheet
AU5009485A (en) Electrically weldable sleeve for joining thermoplastic pipeline parts
Persson Lead Smelting Method
KR850001105Y1 (en) Polyethylene pipe connecting device
JPS56161115A (en) Electroconductive fuse welding method
JPS57187217A (en) Coupling method of shaft and resin molded product
JPS57156872A (en) Soldering method of metallic pipe or ground bar and the like
JPS54131862A (en) Conduction terminal cutting method for sealing metal substance
JPS5832863Y2 (en) Flash welding machine electrode assembly
JPS54112044A (en) Terminal sealing method of sheathed heater
JPS5567546A (en) Glass joining method
JPS57195588A (en) Welding method for cylindrical spacer