JPS57191040U - - Google Patents
Info
- Publication number
- JPS57191040U JPS57191040U JP7737681U JP7737681U JPS57191040U JP S57191040 U JPS57191040 U JP S57191040U JP 7737681 U JP7737681 U JP 7737681U JP 7737681 U JP7737681 U JP 7737681U JP S57191040 U JPS57191040 U JP S57191040U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7737681U JPS57191040U (enExample) | 1981-05-29 | 1981-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7737681U JPS57191040U (enExample) | 1981-05-29 | 1981-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57191040U true JPS57191040U (enExample) | 1982-12-03 |
Family
ID=29873031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7737681U Pending JPS57191040U (enExample) | 1981-05-29 | 1981-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57191040U (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6412523A (en) * | 1987-07-07 | 1989-01-17 | Tel Sagami Ltd | Tube for heat treatment |
| JPH03114223A (ja) * | 1990-04-16 | 1991-05-15 | Shinetsu Sekiei Kk | 石英ガラス製ウエーハボート保持治具 |
| JP2010232637A (ja) * | 2009-03-04 | 2010-10-14 | Hitachi Kokusai Electric Inc | 基板処理装置及び半導体装置の製造方法 |
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1981
- 1981-05-29 JP JP7737681U patent/JPS57191040U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6412523A (en) * | 1987-07-07 | 1989-01-17 | Tel Sagami Ltd | Tube for heat treatment |
| JPH03114223A (ja) * | 1990-04-16 | 1991-05-15 | Shinetsu Sekiei Kk | 石英ガラス製ウエーハボート保持治具 |
| JP2010232637A (ja) * | 2009-03-04 | 2010-10-14 | Hitachi Kokusai Electric Inc | 基板処理装置及び半導体装置の製造方法 |