JPS57190241A - Pressure converter and manufacture thereof - Google Patents

Pressure converter and manufacture thereof

Info

Publication number
JPS57190241A
JPS57190241A JP7488481A JP7488481A JPS57190241A JP S57190241 A JPS57190241 A JP S57190241A JP 7488481 A JP7488481 A JP 7488481A JP 7488481 A JP7488481 A JP 7488481A JP S57190241 A JPS57190241 A JP S57190241A
Authority
JP
Japan
Prior art keywords
diaphragm
strain
case
producing substance
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7488481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6356932B2 (enrdf_load_stackoverflow
Inventor
Tomokimi Okada
Hidekazu Saito
Katsuzo Ishikawa
Hiroshi Takao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KYOWA DENGIYOU KK
Kyowa Electronic Instruments Co Ltd
Original Assignee
KYOWA DENGIYOU KK
Kyowa Electronic Instruments Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KYOWA DENGIYOU KK, Kyowa Electronic Instruments Co Ltd filed Critical KYOWA DENGIYOU KK
Priority to JP7488481A priority Critical patent/JPS57190241A/ja
Publication of JPS57190241A publication Critical patent/JPS57190241A/ja
Publication of JPS6356932B2 publication Critical patent/JPS6356932B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/006—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of metallic strain gauges fixed to an element other than the pressure transmitting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
JP7488481A 1981-05-20 1981-05-20 Pressure converter and manufacture thereof Granted JPS57190241A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7488481A JPS57190241A (en) 1981-05-20 1981-05-20 Pressure converter and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7488481A JPS57190241A (en) 1981-05-20 1981-05-20 Pressure converter and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS57190241A true JPS57190241A (en) 1982-11-22
JPS6356932B2 JPS6356932B2 (enrdf_load_stackoverflow) 1988-11-09

Family

ID=13560230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7488481A Granted JPS57190241A (en) 1981-05-20 1981-05-20 Pressure converter and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS57190241A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US6282956B1 (en) 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US5811693A (en) * 1990-10-12 1998-09-22 Okada; Kazuhiro Force detector and acceleration detector and method of manufacturing the same
US6053057A (en) * 1990-10-12 2000-04-25 Okada; Kazuhiro Force detector
US6158291A (en) * 1990-10-12 2000-12-12 Okada; Kazuhiro Force detector and acceleration detector
US6477903B2 (en) 1990-10-12 2002-11-12 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US6716253B2 (en) 1990-10-12 2004-04-06 Kazuhiro Okada Force detector
US6779408B2 (en) 1990-10-12 2004-08-24 Kazuhiro Okada Force detector
US7152485B2 (en) 1990-10-12 2006-12-26 Kazuhiro Okada Acceleration detector
US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US6941810B2 (en) 1993-03-30 2005-09-13 Kazuhiro Okada Angular velocity sensor
US6282956B1 (en) 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
US6865943B2 (en) 1994-12-29 2005-03-15 Kazuhiro Okada Angular velocity sensor

Also Published As

Publication number Publication date
JPS6356932B2 (enrdf_load_stackoverflow) 1988-11-09

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