JPS57189947A - Substrate transportation device - Google Patents

Substrate transportation device

Info

Publication number
JPS57189947A
JPS57189947A JP7231181A JP7231181A JPS57189947A JP S57189947 A JPS57189947 A JP S57189947A JP 7231181 A JP7231181 A JP 7231181A JP 7231181 A JP7231181 A JP 7231181A JP S57189947 A JPS57189947 A JP S57189947A
Authority
JP
Japan
Prior art keywords
tubes
substrate transportation
transportation device
holes
transportation surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7231181A
Other languages
Japanese (ja)
Inventor
Hideyuki Hirose
Hiromi Yukita
Tsutomu Hanno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7231181A priority Critical patent/JPS57189947A/en
Publication of JPS57189947A publication Critical patent/JPS57189947A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H5/00—Feeding articles separated from piles; Feeding articles to machines
    • B65H5/22—Feeding articles separated from piles; Feeding articles to machines by air-blast or suction device

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)

Abstract

PURPOSE:To reduce the production cost by arranging through holes on flat surfaces extended along the longitudinal direction of the circumference of the tubes. CONSTITUTION:A part of the upper surface of tube 3 with a circular sectional form is machined in a flat plane to make the substrate transportation surface 3a, and gas ejecting holes 3b are provided on the transportation surface 3a, and plural number of the tubes 3 are supported by suspension bars 4 and a base 5. Such tubes can be manufactured at a low cost, through, for example, cold drawing method.
JP7231181A 1981-05-15 1981-05-15 Substrate transportation device Pending JPS57189947A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7231181A JPS57189947A (en) 1981-05-15 1981-05-15 Substrate transportation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7231181A JPS57189947A (en) 1981-05-15 1981-05-15 Substrate transportation device

Publications (1)

Publication Number Publication Date
JPS57189947A true JPS57189947A (en) 1982-11-22

Family

ID=13485592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7231181A Pending JPS57189947A (en) 1981-05-15 1981-05-15 Substrate transportation device

Country Status (1)

Country Link
JP (1) JPS57189947A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111285107A (en) * 2020-02-24 2020-06-16 江苏科技大学 Contactless mobile operating device and control method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111285107A (en) * 2020-02-24 2020-06-16 江苏科技大学 Contactless mobile operating device and control method

Similar Documents

Publication Publication Date Title
GR880300177T1 (en) Metallic honeycomb body, particularly a catalyst carrier, provided with a supporting wall, and its manufacturing process
IT1064936B (en) PROCEDURE FOR THE ABSORPTION OF CO 2..H2S AND SIMILAR IMPURITIES AND REGENERATION OF THE SOLUTION WITH HEAT RETURN IN THE REGENERATION COLUMN BY A CURRENT OF INERT GASES
FR2588421B1 (en) ELECTRODE SUBSTRATE PROVIDED WITH A TUBING FOR A FUEL CELL AND METHOD FOR PRODUCING THE SAME
JPS57189947A (en) Substrate transportation device
HU173989B (en) Hollow shape with annular cross section for producing seamless tubes
JPS553860A (en) Coating method
FR2606082B1 (en) PROPELLER COMBUSTION CHAMBER WITH A SOLID PROPERGOL, AND METHOD FOR THE PRODUCTION THEREOF
JPS51112718A (en) Process for producing light weight ply metal plates
JPS5250055A (en) Heat exchanger using metallic panel for its heat-transmitting face
JPS5359268A (en) Method of burning-up low nox fluid of sludge
JPS527668A (en) Method of manufacturing microchannel plates
JPS57154358A (en) Porous refractories and its production
JPS52113076A (en) Tubular electric bulb and method of manufacturing the same
JPS57202042A (en) Magnetron
ZA773422B (en) Manufacturing process of steel tubes for barrels helicoidally straited in the inner part
JPS51134936A (en) Solar-heat selective absorption plate and production of same
JPS5322650A (en) Manufacturing method of internally groove d heating pipe
JPS53108764A (en) Diffusion jig of semiconductor wafers
JPS57121234A (en) Plasma processing and device thereof
JPS5432390A (en) Separation column for chromatograph and production of the same
SU1020728A1 (en) Device for thermal treatment of pulverulent materials
JPS51117350A (en) Manufacturing method for heat conducting material for heat exchangers
JPS52130170A (en) High-tension discharge lamp
JPS5227069A (en) Gas absorption apparatus
JPS5237217A (en) Anticorrosive metallic comtainer and its manufacturing process