JPS57189446A - High-voltage generating power source - Google Patents

High-voltage generating power source

Info

Publication number
JPS57189446A
JPS57189446A JP7540481A JP7540481A JPS57189446A JP S57189446 A JPS57189446 A JP S57189446A JP 7540481 A JP7540481 A JP 7540481A JP 7540481 A JP7540481 A JP 7540481A JP S57189446 A JPS57189446 A JP S57189446A
Authority
JP
Japan
Prior art keywords
circuit
voltage
voltage generating
power source
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7540481A
Other languages
Japanese (ja)
Inventor
Katsuji Sawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP7540481A priority Critical patent/JPS57189446A/en
Publication of JPS57189446A publication Critical patent/JPS57189446A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Control Of Voltage And Current In General (AREA)

Abstract

PURPOSE:To enable automatic voltage increase from zero to a high value through a simple circuit constitution, and realize improvement of the operational performance of a high-voltage generating power source by interlocking the operation of a high-voltage generating circuit with the operation of a gain correcting circuit, and controlling the output of the said high-voltage generating circuit when the output reaches a value corresponding to the set value of a standard- voltage source. CONSTITUTION:A standard voltage supplied from a standard-voltage source 1 is amplified with an error amplifier 2, and is applied to a gate transistor(TR4) by means of a gain correcting circuit 3. A switching circuit 6, which controls whether or not the output of the circuit 3 is used as a control source for a high- voltage generating circuit 5, is provided between the (TR4) and the circuit 5 applying high voltage to a load(L). The gain correcting circuit 3 is used to stabilize the negative feedback, and the series circuit of a diode (D) and a capacitor (C2) is connected parallel to the series circuit of a resistance (R2) and a capacitor (C1). In addition, a switching circuit 7 interlocked with the switching circuit 6 is connected parallel to the capacitor(C2). As the result, the operational performance of the high-voltage generating power source can be increased.
JP7540481A 1981-05-19 1981-05-19 High-voltage generating power source Pending JPS57189446A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7540481A JPS57189446A (en) 1981-05-19 1981-05-19 High-voltage generating power source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7540481A JPS57189446A (en) 1981-05-19 1981-05-19 High-voltage generating power source

Publications (1)

Publication Number Publication Date
JPS57189446A true JPS57189446A (en) 1982-11-20

Family

ID=13575199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7540481A Pending JPS57189446A (en) 1981-05-19 1981-05-19 High-voltage generating power source

Country Status (1)

Country Link
JP (1) JPS57189446A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61267243A (en) * 1985-05-21 1986-11-26 Hitachi Ltd Charged particle acceleration voltage control method and its device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5578452A (en) * 1978-12-07 1980-06-13 Jeol Ltd Electron gun

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5578452A (en) * 1978-12-07 1980-06-13 Jeol Ltd Electron gun

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61267243A (en) * 1985-05-21 1986-11-26 Hitachi Ltd Charged particle acceleration voltage control method and its device

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