JPS57188888A - Production of photoelectric converter element - Google Patents
Production of photoelectric converter elementInfo
- Publication number
- JPS57188888A JPS57188888A JP56073802A JP7380281A JPS57188888A JP S57188888 A JPS57188888 A JP S57188888A JP 56073802 A JP56073802 A JP 56073802A JP 7380281 A JP7380281 A JP 7380281A JP S57188888 A JPS57188888 A JP S57188888A
- Authority
- JP
- Japan
- Prior art keywords
- supporting plate
- joints
- base
- light receiving
- supporting plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
Abstract
PURPOSE:To form light receiving elements with excellent characteristics close to the end surfaces of joints by a method wherein an auxiliary supporting plate is placed side by side with a supporting plate plate for fixing a base and the base is fixed onto both the supporting plates. CONSTITUTION:A main supporting plate 22 and an auxiliary supporting plate 23 are spiced together on a base 21 and then a compound semiconductor substrate 24 having an area larger then that of the supporting plate 22 is allowed to stand astride both supporting plates and made into a desired thin film. In so doing, the thickness of a part 24' of the substrate near the joints of the main supporting plate 22 and the auxiliary supporting plate 23 is prevented from becoming unequal because of slackenness, whereas light receiving elements 26 are formed near the joints of said supporting plates onward. Thereafter, the auxiliary supporting plate 23 is cut off and the base 21 is removed, thus making it possible to obtain a desired photoelectric chip 28 in which a light receiving element 26a is formed in an edge part close to the end surface 27 of the joints of the main supporting plates 22.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56073802A JPS57188888A (en) | 1981-05-15 | 1981-05-15 | Production of photoelectric converter element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56073802A JPS57188888A (en) | 1981-05-15 | 1981-05-15 | Production of photoelectric converter element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57188888A true JPS57188888A (en) | 1982-11-19 |
Family
ID=13528661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56073802A Pending JPS57188888A (en) | 1981-05-15 | 1981-05-15 | Production of photoelectric converter element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57188888A (en) |
-
1981
- 1981-05-15 JP JP56073802A patent/JPS57188888A/en active Pending
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