JPS57187606A - Method and device for automatically discovering error of flat figure - Google Patents

Method and device for automatically discovering error of flat figure

Info

Publication number
JPS57187606A
JPS57187606A JP6523782A JP6523782A JPS57187606A JP S57187606 A JPS57187606 A JP S57187606A JP 6523782 A JP6523782 A JP 6523782A JP 6523782 A JP6523782 A JP 6523782A JP S57187606 A JPS57187606 A JP S57187606A
Authority
JP
Japan
Prior art keywords
flat
automatically discovering
error
discovering error
automatically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6523782A
Other languages
Japanese (ja)
Inventor
Deiitaa Yakobii Hansu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ernst Leitz Wetzlar GmbH
Original Assignee
Ernst Leitz Wetzlar GmbH
Ernst Leitz GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ernst Leitz Wetzlar GmbH, Ernst Leitz GmbH filed Critical Ernst Leitz Wetzlar GmbH
Publication of JPS57187606A publication Critical patent/JPS57187606A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • G03F1/84—Inspecting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP6523782A 1981-05-11 1982-04-19 Method and device for automatically discovering error of flat figure Pending JPS57187606A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19813118646 DE3118646A1 (en) 1981-05-11 1981-05-11 Method and device for automatically detecting defects in planar patterns

Publications (1)

Publication Number Publication Date
JPS57187606A true JPS57187606A (en) 1982-11-18

Family

ID=6132001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6523782A Pending JPS57187606A (en) 1981-05-11 1982-04-19 Method and device for automatically discovering error of flat figure

Country Status (2)

Country Link
JP (1) JPS57187606A (en)
DE (1) DE3118646A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6093305A (en) * 1983-10-27 1985-05-25 Fujitsu Ltd Method for mask examination
JPS60166809A (en) * 1984-02-10 1985-08-30 Toshiba Corp Defect inspecting device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3314465A1 (en) * 1983-04-21 1984-10-25 Robert Bosch Gmbh, 7000 Stuttgart Optical surface testing method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6093305A (en) * 1983-10-27 1985-05-25 Fujitsu Ltd Method for mask examination
JPH0417361B2 (en) * 1983-10-27 1992-03-25 Fujitsu Ltd
JPS60166809A (en) * 1984-02-10 1985-08-30 Toshiba Corp Defect inspecting device
JPH047808B2 (en) * 1984-02-10 1992-02-13 Tokyo Shibaura Electric Co

Also Published As

Publication number Publication date
DE3118646A1 (en) 1982-12-02

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