JPS57183515U - - Google Patents

Info

Publication number
JPS57183515U
JPS57183515U JP7179881U JP7179881U JPS57183515U JP S57183515 U JPS57183515 U JP S57183515U JP 7179881 U JP7179881 U JP 7179881U JP 7179881 U JP7179881 U JP 7179881U JP S57183515 U JPS57183515 U JP S57183515U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7179881U
Other versions
JPS644091Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7179881U priority Critical patent/JPS644091Y2/ja
Publication of JPS57183515U publication Critical patent/JPS57183515U/ja
Application granted granted Critical
Publication of JPS644091Y2 publication Critical patent/JPS644091Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP7179881U 1981-05-18 1981-05-18 Expired JPS644091Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7179881U JPS644091Y2 (ja) 1981-05-18 1981-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7179881U JPS644091Y2 (ja) 1981-05-18 1981-05-18

Publications (2)

Publication Number Publication Date
JPS57183515U true JPS57183515U (ja) 1982-11-20
JPS644091Y2 JPS644091Y2 (ja) 1989-02-02

Family

ID=29867588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7179881U Expired JPS644091Y2 (ja) 1981-05-18 1981-05-18

Country Status (1)

Country Link
JP (1) JPS644091Y2 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002524271A (ja) * 1998-09-02 2002-08-06 エクスロス・インク 捩り撓みヒンジで連結されて相対的に回転する微細加工部材
JP2003527621A (ja) * 1999-07-13 2003-09-16 インプット／アウトプット，インコーポレーテッド マイクロマシン加工ミラー・デバイス
WO2004049035A1 (ja) * 2002-11-26 2004-06-10 Brother Kogyo Kabushiki Kaisha 光走査装置および画像形成装置
JP2006330505A (ja) * 2005-05-27 2006-12-07 Seiko Epson Corp アクチュエータ
JP2011027973A (ja) * 2009-07-24 2011-02-10 Fujitsu Ltd マイクロ素子

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002524271A (ja) * 1998-09-02 2002-08-06 エクスロス・インク 捩り撓みヒンジで連結されて相対的に回転する微細加工部材
JP2011104768A (ja) * 1998-09-02 2011-06-02 Xros Inc 捩り撓みヒンジで連結されて相対的に回転する微細加工部材
JP2013099843A (ja) * 1998-09-02 2013-05-23 Xros Inc 捩り撓みヒンジで連結されて相対的に回転する微細加工部材
JP2014176964A (ja) * 1998-09-02 2014-09-25 Xros Inc 捩り撓みヒンジで連結されて相対的に回転する微細加工部材
JP2003527621A (ja) * 1999-07-13 2003-09-16 インプット／アウトプット，インコーポレーテッド マイクロマシン加工ミラー・デバイス
WO2004049035A1 (ja) * 2002-11-26 2004-06-10 Brother Kogyo Kabushiki Kaisha 光走査装置および画像形成装置
JP2006330505A (ja) * 2005-05-27 2006-12-07 Seiko Epson Corp アクチュエータ
JP4581847B2 (ja) * 2005-05-27 2010-11-17 セイコーエプソン株式会社 アクチュエータ
JP2011027973A (ja) * 2009-07-24 2011-02-10 Fujitsu Ltd マイクロ素子

Also Published As

Publication number Publication date
JPS644091Y2 (ja) 1989-02-02

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