JPS57183336U - - Google Patents

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Publication number
JPS57183336U
JPS57183336U JP7145681U JP7145681U JPS57183336U JP S57183336 U JPS57183336 U JP S57183336U JP 7145681 U JP7145681 U JP 7145681U JP 7145681 U JP7145681 U JP 7145681U JP S57183336 U JPS57183336 U JP S57183336U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7145681U
Other languages
Japanese (ja)
Other versions
JPS6117151Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7145681U priority Critical patent/JPS6117151Y2/ja
Publication of JPS57183336U publication Critical patent/JPS57183336U/ja
Application granted granted Critical
Publication of JPS6117151Y2 publication Critical patent/JPS6117151Y2/ja
Expired legal-status Critical Current

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  • Floor Finish (AREA)
JP7145681U 1981-05-19 1981-05-19 Expired JPS6117151Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7145681U JPS6117151Y2 (enrdf_load_stackoverflow) 1981-05-19 1981-05-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7145681U JPS6117151Y2 (enrdf_load_stackoverflow) 1981-05-19 1981-05-19

Publications (2)

Publication Number Publication Date
JPS57183336U true JPS57183336U (enrdf_load_stackoverflow) 1982-11-20
JPS6117151Y2 JPS6117151Y2 (enrdf_load_stackoverflow) 1986-05-26

Family

ID=29867249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7145681U Expired JPS6117151Y2 (enrdf_load_stackoverflow) 1981-05-19 1981-05-19

Country Status (1)

Country Link
JP (1) JPS6117151Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03128147U (enrdf_load_stackoverflow) * 1990-04-09 1991-12-24
JP2010222822A (ja) * 2009-03-23 2010-10-07 Dooei Gaiso Kk 天井用目地装置
JP2017133276A (ja) * 2016-01-29 2017-08-03 理研軽金属工業株式会社 エキスパンションジョイントカバー装置

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6748960B1 (en) 1999-11-02 2004-06-15 Tokyo Electron Limited Apparatus for supercritical processing of multiple workpieces
KR100742473B1 (ko) 1999-11-02 2007-07-25 동경 엘렉트론 주식회사 제 1 및 제 2 소재를 초임계 처리하는 장치 및 방법
US7186093B2 (en) 2004-10-05 2007-03-06 Tokyo Electron Limited Method and apparatus for cooling motor bearings of a high pressure pump
US7250374B2 (en) 2004-06-30 2007-07-31 Tokyo Electron Limited System and method for processing a substrate using supercritical carbon dioxide processing
US7307019B2 (en) 2004-09-29 2007-12-11 Tokyo Electron Limited Method for supercritical carbon dioxide processing of fluoro-carbon films
US7491036B2 (en) 2004-11-12 2009-02-17 Tokyo Electron Limited Method and system for cooling a pump
US7140393B2 (en) 2004-12-22 2006-11-28 Tokyo Electron Limited Non-contact shuttle valve for flow diversion in high pressure systems
US7434590B2 (en) 2004-12-22 2008-10-14 Tokyo Electron Limited Method and apparatus for clamping a substrate in a high pressure processing system
US7291565B2 (en) 2005-02-15 2007-11-06 Tokyo Electron Limited Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
US7380984B2 (en) 2005-03-28 2008-06-03 Tokyo Electron Limited Process flow thermocouple
US7494107B2 (en) 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7524383B2 (en) 2005-05-25 2009-04-28 Tokyo Electron Limited Method and system for passivating a processing chamber

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03128147U (enrdf_load_stackoverflow) * 1990-04-09 1991-12-24
JP2010222822A (ja) * 2009-03-23 2010-10-07 Dooei Gaiso Kk 天井用目地装置
JP2017133276A (ja) * 2016-01-29 2017-08-03 理研軽金属工業株式会社 エキスパンションジョイントカバー装置

Also Published As

Publication number Publication date
JPS6117151Y2 (enrdf_load_stackoverflow) 1986-05-26

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