JPS57182106A - Method and device for optically measuring displacement and photo-repeater on thin piece - Google Patents

Method and device for optically measuring displacement and photo-repeater on thin piece

Info

Publication number
JPS57182106A
JPS57182106A JP57062603A JP6260382A JPS57182106A JP S57182106 A JPS57182106 A JP S57182106A JP 57062603 A JP57062603 A JP 57062603A JP 6260382 A JP6260382 A JP 6260382A JP S57182106 A JPS57182106 A JP S57182106A
Authority
JP
Japan
Prior art keywords
repeater
photo
thin piece
optically measuring
measuring displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57062603A
Other languages
English (en)
Inventor
Teigurea Pooru
Berujiyu Rooran
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UROMASUKU
EUROMASK
Original Assignee
UROMASUKU
EUROMASK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UROMASUKU, EUROMASK filed Critical UROMASUKU
Publication of JPS57182106A publication Critical patent/JPS57182106A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP57062603A 1981-04-16 1982-04-16 Method and device for optically measuring displacement and photo-repeater on thin piece Pending JPS57182106A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8107708A FR2504256A1 (fr) 1981-04-16 1981-04-16 Procede et dispositif de mesure optique de deplacement et application aux photorepeteurs sur tranche

Publications (1)

Publication Number Publication Date
JPS57182106A true JPS57182106A (en) 1982-11-09

Family

ID=9257504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57062603A Pending JPS57182106A (en) 1981-04-16 1982-04-16 Method and device for optically measuring displacement and photo-repeater on thin piece

Country Status (3)

Country Link
EP (1) EP0065429A1 (ja)
JP (1) JPS57182106A (ja)
FR (1) FR2504256A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0311144B1 (en) * 1983-11-04 1993-07-14 Sony Magnescale, Inc. Optical instrument for measuring displacement
DE3625327C1 (de) * 1986-07-26 1988-02-18 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmesseinrichtung
US5198873A (en) * 1988-10-19 1993-03-30 Canon Kabushiki Kaisha Encoder utilizing interference using multi-mode semiconductor laser
JP2547826B2 (ja) * 1988-10-19 1996-10-23 キヤノン株式会社 マルチモード半導体レーザを使用する干渉計測装置
US5021649A (en) * 1989-03-28 1991-06-04 Canon Kabushiki Kaisha Relief diffraction grating encoder
DE69002503T2 (de) * 1989-03-29 1994-03-03 Canon Kk Kantendetektor.

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5174659A (ja) * 1974-12-24 1976-06-28 Nippon Electric Co

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2636211C2 (de) * 1976-08-12 1978-01-26 Ibm Deutschland Gmbh, 7000 Stuttgart Interferometrisches Verfahren zur Abstands- oder Ebenheitsmessung
JPS54500096A (ja) * 1977-11-25 1979-12-20
US4265534A (en) * 1977-12-23 1981-05-05 Remijan Paul W Optical apparatus and method for producing the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5174659A (ja) * 1974-12-24 1976-06-28 Nippon Electric Co

Also Published As

Publication number Publication date
FR2504256A1 (fr) 1982-10-22
FR2504256B1 (ja) 1985-05-17
EP0065429A1 (fr) 1982-11-24

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