JPS57180756U - - Google Patents
Info
- Publication number
- JPS57180756U JPS57180756U JP6715881U JP6715881U JPS57180756U JP S57180756 U JPS57180756 U JP S57180756U JP 6715881 U JP6715881 U JP 6715881U JP 6715881 U JP6715881 U JP 6715881U JP S57180756 U JPS57180756 U JP S57180756U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6715881U JPS57180756U (enExample) | 1981-05-08 | 1981-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6715881U JPS57180756U (enExample) | 1981-05-08 | 1981-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57180756U true JPS57180756U (enExample) | 1982-11-16 |
Family
ID=29863173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6715881U Pending JPS57180756U (enExample) | 1981-05-08 | 1981-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57180756U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6283467A (ja) * | 1985-10-09 | 1987-04-16 | Sharp Corp | パレツト移動型スパツタリング装置 |
-
1981
- 1981-05-08 JP JP6715881U patent/JPS57180756U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6283467A (ja) * | 1985-10-09 | 1987-04-16 | Sharp Corp | パレツト移動型スパツタリング装置 |