JPS57180756U - - Google Patents

Info

Publication number
JPS57180756U
JPS57180756U JP6715881U JP6715881U JPS57180756U JP S57180756 U JPS57180756 U JP S57180756U JP 6715881 U JP6715881 U JP 6715881U JP 6715881 U JP6715881 U JP 6715881U JP S57180756 U JPS57180756 U JP S57180756U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6715881U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6715881U priority Critical patent/JPS57180756U/ja
Publication of JPS57180756U publication Critical patent/JPS57180756U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6715881U 1981-05-08 1981-05-08 Pending JPS57180756U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6715881U JPS57180756U (enrdf_load_stackoverflow) 1981-05-08 1981-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6715881U JPS57180756U (enrdf_load_stackoverflow) 1981-05-08 1981-05-08

Publications (1)

Publication Number Publication Date
JPS57180756U true JPS57180756U (enrdf_load_stackoverflow) 1982-11-16

Family

ID=29863173

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6715881U Pending JPS57180756U (enrdf_load_stackoverflow) 1981-05-08 1981-05-08

Country Status (1)

Country Link
JP (1) JPS57180756U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6283467A (ja) * 1985-10-09 1987-04-16 Sharp Corp パレツト移動型スパツタリング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6283467A (ja) * 1985-10-09 1987-04-16 Sharp Corp パレツト移動型スパツタリング装置

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