JPS57180060A - Astigmation correction procedure and its apparatus in scanning electron microscope and its analogous equipment - Google Patents

Astigmation correction procedure and its apparatus in scanning electron microscope and its analogous equipment

Info

Publication number
JPS57180060A
JPS57180060A JP56064471A JP6447181A JPS57180060A JP S57180060 A JPS57180060 A JP S57180060A JP 56064471 A JP56064471 A JP 56064471A JP 6447181 A JP6447181 A JP 6447181A JP S57180060 A JPS57180060 A JP S57180060A
Authority
JP
Japan
Prior art keywords
correction
astigmation
sawtooth wave
circuits
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56064471A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6329379B2 (enrdf_load_stackoverflow
Inventor
Takashi Kimura
Masahiro Inoue
Seiichiro Satomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP56064471A priority Critical patent/JPS57180060A/ja
Publication of JPS57180060A publication Critical patent/JPS57180060A/ja
Publication of JPS6329379B2 publication Critical patent/JPS6329379B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56064471A 1981-04-28 1981-04-28 Astigmation correction procedure and its apparatus in scanning electron microscope and its analogous equipment Granted JPS57180060A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56064471A JPS57180060A (en) 1981-04-28 1981-04-28 Astigmation correction procedure and its apparatus in scanning electron microscope and its analogous equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56064471A JPS57180060A (en) 1981-04-28 1981-04-28 Astigmation correction procedure and its apparatus in scanning electron microscope and its analogous equipment

Publications (2)

Publication Number Publication Date
JPS57180060A true JPS57180060A (en) 1982-11-05
JPS6329379B2 JPS6329379B2 (enrdf_load_stackoverflow) 1988-06-13

Family

ID=13259168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56064471A Granted JPS57180060A (en) 1981-04-28 1981-04-28 Astigmation correction procedure and its apparatus in scanning electron microscope and its analogous equipment

Country Status (1)

Country Link
JP (1) JPS57180060A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04115448A (ja) * 1990-09-06 1992-04-16 Hitachi Ltd 電子線装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04115448A (ja) * 1990-09-06 1992-04-16 Hitachi Ltd 電子線装置

Also Published As

Publication number Publication date
JPS6329379B2 (enrdf_load_stackoverflow) 1988-06-13

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