JPS5717903Y2 - - Google Patents

Info

Publication number
JPS5717903Y2
JPS5717903Y2 JP1977003269U JP326977U JPS5717903Y2 JP S5717903 Y2 JPS5717903 Y2 JP S5717903Y2 JP 1977003269 U JP1977003269 U JP 1977003269U JP 326977 U JP326977 U JP 326977U JP S5717903 Y2 JPS5717903 Y2 JP S5717903Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977003269U
Other languages
Japanese (ja)
Other versions
JPS5398775U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977003269U priority Critical patent/JPS5717903Y2/ja
Publication of JPS5398775U publication Critical patent/JPS5398775U/ja
Application granted granted Critical
Publication of JPS5717903Y2 publication Critical patent/JPS5717903Y2/ja
Expired legal-status Critical Current

Links

JP1977003269U 1977-01-14 1977-01-14 Expired JPS5717903Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977003269U JPS5717903Y2 (en:Method) 1977-01-14 1977-01-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977003269U JPS5717903Y2 (en:Method) 1977-01-14 1977-01-14

Publications (2)

Publication Number Publication Date
JPS5398775U JPS5398775U (en:Method) 1978-08-10
JPS5717903Y2 true JPS5717903Y2 (en:Method) 1982-04-14

Family

ID=28690226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977003269U Expired JPS5717903Y2 (en:Method) 1977-01-14 1977-01-14

Country Status (1)

Country Link
JP (1) JPS5717903Y2 (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI771007B (zh) 2020-05-19 2022-07-11 環球晶圓股份有限公司 矽單晶錠的製造方法、矽單晶錠及其製造裝置
JP7525568B2 (ja) 2021-10-12 2024-07-30 環球晶圓股▲ふん▼有限公司 シリコンインゴット単結晶を製造するための方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5335399Y2 (en:Method) * 1973-06-26 1978-08-30

Also Published As

Publication number Publication date
JPS5398775U (en:Method) 1978-08-10

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