JPS57173706A - Device for checking linear body - Google Patents

Device for checking linear body

Info

Publication number
JPS57173706A
JPS57173706A JP56058879A JP5887981A JPS57173706A JP S57173706 A JPS57173706 A JP S57173706A JP 56058879 A JP56058879 A JP 56058879A JP 5887981 A JP5887981 A JP 5887981A JP S57173706 A JPS57173706 A JP S57173706A
Authority
JP
Japan
Prior art keywords
stage
handle
moved
hair
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56058879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS634643B2 (enExample
Inventor
Takeshi Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP56058879A priority Critical patent/JPS57173706A/ja
Publication of JPS57173706A publication Critical patent/JPS57173706A/ja
Publication of JPS634643B2 publication Critical patent/JPS634643B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
    • G01B5/285—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces for controlling eveness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP56058879A 1981-04-17 1981-04-17 Device for checking linear body Granted JPS57173706A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56058879A JPS57173706A (en) 1981-04-17 1981-04-17 Device for checking linear body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56058879A JPS57173706A (en) 1981-04-17 1981-04-17 Device for checking linear body

Publications (2)

Publication Number Publication Date
JPS57173706A true JPS57173706A (en) 1982-10-26
JPS634643B2 JPS634643B2 (enExample) 1988-01-29

Family

ID=13097038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56058879A Granted JPS57173706A (en) 1981-04-17 1981-04-17 Device for checking linear body

Country Status (1)

Country Link
JP (1) JPS57173706A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62128356U (enExample) * 1986-02-07 1987-08-14
JP2007256272A (ja) * 2006-02-24 2007-10-04 Hitachi High-Technologies Corp 表面検査装置
US8577119B2 (en) 2006-02-24 2013-11-05 Hitachi High-Technologies Corporation Wafer surface observing method and apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62128356U (enExample) * 1986-02-07 1987-08-14
JP2007256272A (ja) * 2006-02-24 2007-10-04 Hitachi High-Technologies Corp 表面検査装置
US8577119B2 (en) 2006-02-24 2013-11-05 Hitachi High-Technologies Corporation Wafer surface observing method and apparatus

Also Published As

Publication number Publication date
JPS634643B2 (enExample) 1988-01-29

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