JPS57172343A - Manufacture of photo-mask - Google Patents
Manufacture of photo-maskInfo
- Publication number
- JPS57172343A JPS57172343A JP20506281A JP20506281A JPS57172343A JP S57172343 A JPS57172343 A JP S57172343A JP 20506281 A JP20506281 A JP 20506281A JP 20506281 A JP20506281 A JP 20506281A JP S57172343 A JPS57172343 A JP S57172343A
- Authority
- JP
- Japan
- Prior art keywords
- photo
- mask
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH936680 | 1980-12-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57172343A true JPS57172343A (en) | 1982-10-23 |
Family
ID=4351232
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20506281A Pending JPS57172343A (en) | 1980-12-18 | 1981-12-18 | Manufacture of photo-mask |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS57172343A (en) |
DE (1) | DE3147644A1 (en) |
FR (1) | FR2496914A1 (en) |
GB (1) | GB2090016B (en) |
NL (1) | NL8105495A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4770947A (en) * | 1987-01-02 | 1988-09-13 | International Business Machines Corporation | Multiple density mask and fabrication thereof |
KR950002172B1 (en) * | 1991-06-13 | 1995-03-14 | 금성일렉트론주식회사 | Polarized light exposuring apparatus and mask manufacturing method using polarizer |
-
1981
- 1981-12-02 DE DE19813147644 patent/DE3147644A1/en not_active Withdrawn
- 1981-12-07 NL NL8105495A patent/NL8105495A/en not_active Application Discontinuation
- 1981-12-17 FR FR8123586A patent/FR2496914A1/en active Granted
- 1981-12-17 GB GB8138155A patent/GB2090016B/en not_active Expired
- 1981-12-18 JP JP20506281A patent/JPS57172343A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2496914A1 (en) | 1982-06-25 |
DE3147644A1 (en) | 1982-11-18 |
GB2090016B (en) | 1984-07-18 |
NL8105495A (en) | 1982-07-16 |
GB2090016A (en) | 1982-06-30 |
FR2496914B3 (en) | 1983-11-10 |
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