JPS5717139U - - Google Patents
Info
- Publication number
- JPS5717139U JPS5717139U JP9332780U JP9332780U JPS5717139U JP S5717139 U JPS5717139 U JP S5717139U JP 9332780 U JP9332780 U JP 9332780U JP 9332780 U JP9332780 U JP 9332780U JP S5717139 U JPS5717139 U JP S5717139U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980093327U JPS6220999Y2 (enExample) | 1980-07-02 | 1980-07-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980093327U JPS6220999Y2 (enExample) | 1980-07-02 | 1980-07-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5717139U true JPS5717139U (enExample) | 1982-01-28 |
| JPS6220999Y2 JPS6220999Y2 (enExample) | 1987-05-28 |
Family
ID=29455273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980093327U Expired JPS6220999Y2 (enExample) | 1980-07-02 | 1980-07-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6220999Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52139378A (en) * | 1976-05-17 | 1977-11-21 | Hitachi Ltd | Integrated treatment apparatus for semiconductor wafers |
-
1980
- 1980-07-02 JP JP1980093327U patent/JPS6220999Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52139378A (en) * | 1976-05-17 | 1977-11-21 | Hitachi Ltd | Integrated treatment apparatus for semiconductor wafers |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6220999Y2 (enExample) | 1987-05-28 |