JPS57170547U - - Google Patents
Info
- Publication number
- JPS57170547U JPS57170547U JP5757981U JP5757981U JPS57170547U JP S57170547 U JPS57170547 U JP S57170547U JP 5757981 U JP5757981 U JP 5757981U JP 5757981 U JP5757981 U JP 5757981U JP S57170547 U JPS57170547 U JP S57170547U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5757981U JPS57170547U (enExample) | 1981-04-20 | 1981-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5757981U JPS57170547U (enExample) | 1981-04-20 | 1981-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57170547U true JPS57170547U (enExample) | 1982-10-27 |
Family
ID=29854044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5757981U Pending JPS57170547U (enExample) | 1981-04-20 | 1981-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57170547U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5965530U (ja) * | 1982-10-22 | 1984-05-01 | 富士通株式会社 | 電子ビ−ム露光装置 |
| JPS63221617A (ja) * | 1987-03-10 | 1988-09-14 | Fujitsu Ltd | 荷電粒子線露光における乾板の製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5339079A (en) * | 1976-09-22 | 1978-04-10 | Hitachi Ltd | Heat radiating base plate in power semiconductor devices |
| JPS5339078A (en) * | 1976-09-22 | 1978-04-10 | Mitsubishi Electric Corp | Electron beam exposure method |
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1981
- 1981-04-20 JP JP5757981U patent/JPS57170547U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5339079A (en) * | 1976-09-22 | 1978-04-10 | Hitachi Ltd | Heat radiating base plate in power semiconductor devices |
| JPS5339078A (en) * | 1976-09-22 | 1978-04-10 | Mitsubishi Electric Corp | Electron beam exposure method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5965530U (ja) * | 1982-10-22 | 1984-05-01 | 富士通株式会社 | 電子ビ−ム露光装置 |
| JPS63221617A (ja) * | 1987-03-10 | 1988-09-14 | Fujitsu Ltd | 荷電粒子線露光における乾板の製造方法 |