JPS57168165U - - Google Patents
Info
- Publication number
- JPS57168165U JPS57168165U JP5550881U JP5550881U JPS57168165U JP S57168165 U JPS57168165 U JP S57168165U JP 5550881 U JP5550881 U JP 5550881U JP 5550881 U JP5550881 U JP 5550881U JP S57168165 U JPS57168165 U JP S57168165U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981055508U JPH0227492Y2 (enExample) | 1981-04-17 | 1981-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981055508U JPH0227492Y2 (enExample) | 1981-04-17 | 1981-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57168165U true JPS57168165U (enExample) | 1982-10-22 |
| JPH0227492Y2 JPH0227492Y2 (enExample) | 1990-07-25 |
Family
ID=29852061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981055508U Expired JPH0227492Y2 (enExample) | 1981-04-17 | 1981-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0227492Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011054426A (ja) * | 2009-09-02 | 2011-03-17 | Shimadzu Corp | 荷電粒子ビーム照射装置及び該装置の軸合わせ調整方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52150959A (en) * | 1976-06-10 | 1977-12-15 | Jeol Ltd | Electronic microscope or its similar device |
-
1981
- 1981-04-17 JP JP1981055508U patent/JPH0227492Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52150959A (en) * | 1976-06-10 | 1977-12-15 | Jeol Ltd | Electronic microscope or its similar device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011054426A (ja) * | 2009-09-02 | 2011-03-17 | Shimadzu Corp | 荷電粒子ビーム照射装置及び該装置の軸合わせ調整方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0227492Y2 (enExample) | 1990-07-25 |