JPS57168165U - - Google Patents

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Publication number
JPS57168165U
JPS57168165U JP5550881U JP5550881U JPS57168165U JP S57168165 U JPS57168165 U JP S57168165U JP 5550881 U JP5550881 U JP 5550881U JP 5550881 U JP5550881 U JP 5550881U JP S57168165 U JPS57168165 U JP S57168165U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5550881U
Other languages
Japanese (ja)
Other versions
JPH0227492Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981055508U priority Critical patent/JPH0227492Y2/ja
Publication of JPS57168165U publication Critical patent/JPS57168165U/ja
Application granted granted Critical
Publication of JPH0227492Y2 publication Critical patent/JPH0227492Y2/ja
Expired legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)
JP1981055508U 1981-04-17 1981-04-17 Expired JPH0227492Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981055508U JPH0227492Y2 (enrdf_load_stackoverflow) 1981-04-17 1981-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981055508U JPH0227492Y2 (enrdf_load_stackoverflow) 1981-04-17 1981-04-17

Publications (2)

Publication Number Publication Date
JPS57168165U true JPS57168165U (enrdf_load_stackoverflow) 1982-10-22
JPH0227492Y2 JPH0227492Y2 (enrdf_load_stackoverflow) 1990-07-25

Family

ID=29852061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981055508U Expired JPH0227492Y2 (enrdf_load_stackoverflow) 1981-04-17 1981-04-17

Country Status (1)

Country Link
JP (1) JPH0227492Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011054426A (ja) * 2009-09-02 2011-03-17 Shimadzu Corp 荷電粒子ビーム照射装置及び該装置の軸合わせ調整方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52150959A (en) * 1976-06-10 1977-12-15 Jeol Ltd Electronic microscope or its similar device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52150959A (en) * 1976-06-10 1977-12-15 Jeol Ltd Electronic microscope or its similar device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011054426A (ja) * 2009-09-02 2011-03-17 Shimadzu Corp 荷電粒子ビーム照射装置及び該装置の軸合わせ調整方法

Also Published As

Publication number Publication date
JPH0227492Y2 (enrdf_load_stackoverflow) 1990-07-25

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