JPS5716735B2 - - Google Patents
Info
- Publication number
- JPS5716735B2 JPS5716735B2 JP14509376A JP14509376A JPS5716735B2 JP S5716735 B2 JPS5716735 B2 JP S5716735B2 JP 14509376 A JP14509376 A JP 14509376A JP 14509376 A JP14509376 A JP 14509376A JP S5716735 B2 JPS5716735 B2 JP S5716735B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14509376A JPS5368977A (en) | 1976-12-01 | 1976-12-01 | Plasma etching apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14509376A JPS5368977A (en) | 1976-12-01 | 1976-12-01 | Plasma etching apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5368977A JPS5368977A (en) | 1978-06-19 |
| JPS5716735B2 true JPS5716735B2 (de) | 1982-04-07 |
Family
ID=15377204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14509376A Granted JPS5368977A (en) | 1976-12-01 | 1976-12-01 | Plasma etching apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5368977A (de) |
-
1976
- 1976-12-01 JP JP14509376A patent/JPS5368977A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5368977A (en) | 1978-06-19 |