JPS57166677U - - Google Patents

Info

Publication number
JPS57166677U
JPS57166677U JP5401681U JP5401681U JPS57166677U JP S57166677 U JPS57166677 U JP S57166677U JP 5401681 U JP5401681 U JP 5401681U JP 5401681 U JP5401681 U JP 5401681U JP S57166677 U JPS57166677 U JP S57166677U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5401681U
Other languages
Japanese (ja)
Other versions
JPS634624Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981054016U priority Critical patent/JPS634624Y2/ja
Publication of JPS57166677U publication Critical patent/JPS57166677U/ja
Application granted granted Critical
Publication of JPS634624Y2 publication Critical patent/JPS634624Y2/ja
Expired legal-status Critical Current

Links

JP1981054016U 1981-04-14 1981-04-14 Expired JPS634624Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981054016U JPS634624Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-04-14 1981-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981054016U JPS634624Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-04-14 1981-04-14

Publications (2)

Publication Number Publication Date
JPS57166677U true JPS57166677U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-10-20
JPS634624Y2 JPS634624Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-02-05

Family

ID=29850628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981054016U Expired JPS634624Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-04-14 1981-04-14

Country Status (1)

Country Link
JP (1) JPS634624Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1052569C (zh) 1992-08-27 2000-05-17 株式会社半导体能源研究所 制造半导体器件的方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49145280U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-04-12 1974-12-14
JPS54124295U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-02-21 1979-08-30

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49145280U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-04-12 1974-12-14
JPS54124295U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-02-21 1979-08-30

Also Published As

Publication number Publication date
JPS634624Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-02-05

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