JPS5716497B2 - - Google Patents
Info
- Publication number
- JPS5716497B2 JPS5716497B2 JP9138773A JP9138773A JPS5716497B2 JP S5716497 B2 JPS5716497 B2 JP S5716497B2 JP 9138773 A JP9138773 A JP 9138773A JP 9138773 A JP9138773 A JP 9138773A JP S5716497 B2 JPS5716497 B2 JP S5716497B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Dicing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9138773A JPS5716497B2 (ja) | 1973-08-14 | 1973-08-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9138773A JPS5716497B2 (ja) | 1973-08-14 | 1973-08-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5040068A JPS5040068A (ja) | 1975-04-12 |
JPS5716497B2 true JPS5716497B2 (ja) | 1982-04-05 |
Family
ID=14024952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9138773A Expired JPS5716497B2 (ja) | 1973-08-14 | 1973-08-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5716497B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54127580A (en) * | 1978-03-27 | 1979-10-03 | Nippon Electric Co | Laser scribing method |
JPS5917235A (ja) * | 1982-07-20 | 1984-01-28 | Nec Corp | 半導体装置の製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49116955A (ja) * | 1973-03-09 | 1974-11-08 |
-
1973
- 1973-08-14 JP JP9138773A patent/JPS5716497B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49116955A (ja) * | 1973-03-09 | 1974-11-08 |
Also Published As
Publication number | Publication date |
---|---|
JPS5040068A (ja) | 1975-04-12 |