JPS54127580A - Laser scribing method - Google Patents

Laser scribing method

Info

Publication number
JPS54127580A
JPS54127580A JP3579578A JP3579578A JPS54127580A JP S54127580 A JPS54127580 A JP S54127580A JP 3579578 A JP3579578 A JP 3579578A JP 3579578 A JP3579578 A JP 3579578A JP S54127580 A JPS54127580 A JP S54127580A
Authority
JP
Japan
Prior art keywords
laser scribing
scribing method
laser
scribing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3579578A
Other languages
Japanese (ja)
Inventor
Shirou Kasai
Keiji Harada
Akio Satou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP3579578A priority Critical patent/JPS54127580A/en
Publication of JPS54127580A publication Critical patent/JPS54127580A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
JP3579578A 1978-03-27 1978-03-27 Laser scribing method Pending JPS54127580A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3579578A JPS54127580A (en) 1978-03-27 1978-03-27 Laser scribing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3579578A JPS54127580A (en) 1978-03-27 1978-03-27 Laser scribing method

Publications (1)

Publication Number Publication Date
JPS54127580A true JPS54127580A (en) 1979-10-03

Family

ID=12451848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3579578A Pending JPS54127580A (en) 1978-03-27 1978-03-27 Laser scribing method

Country Status (1)

Country Link
JP (1) JPS54127580A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61152093A (en) * 1984-12-26 1986-07-10 株式会社日立製作所 Boring of printed circuit board by energy beam
JP2003203889A (en) * 2002-01-08 2003-07-18 Fujitsu Ltd Method for manufacturing semiconductor device
JP2006286763A (en) * 2005-03-31 2006-10-19 Disco Abrasive Syst Ltd Laser machining method and laser machining apparatus for wafer
JP2008031021A (en) * 2006-07-31 2008-02-14 Optrex Corp Method of cutting substrate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49116955A (en) * 1973-03-09 1974-11-08
JPS5040068A (en) * 1973-08-14 1975-04-12

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49116955A (en) * 1973-03-09 1974-11-08
JPS5040068A (en) * 1973-08-14 1975-04-12

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61152093A (en) * 1984-12-26 1986-07-10 株式会社日立製作所 Boring of printed circuit board by energy beam
JPH0479158B2 (en) * 1984-12-26 1992-12-15 Hitachi Ltd
JP2003203889A (en) * 2002-01-08 2003-07-18 Fujitsu Ltd Method for manufacturing semiconductor device
JP2006286763A (en) * 2005-03-31 2006-10-19 Disco Abrasive Syst Ltd Laser machining method and laser machining apparatus for wafer
JP4648056B2 (en) * 2005-03-31 2011-03-09 株式会社ディスコ Wafer laser processing method and laser processing apparatus
JP2008031021A (en) * 2006-07-31 2008-02-14 Optrex Corp Method of cutting substrate

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