JPS57164438A - Thin film forming device - Google Patents

Thin film forming device

Info

Publication number
JPS57164438A
JPS57164438A JP56049853A JP4985381A JPS57164438A JP S57164438 A JPS57164438 A JP S57164438A JP 56049853 A JP56049853 A JP 56049853A JP 4985381 A JP4985381 A JP 4985381A JP S57164438 A JPS57164438 A JP S57164438A
Authority
JP
Japan
Prior art keywords
roller
substrate
thin film
vapor
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56049853A
Other languages
English (en)
Japanese (ja)
Other versions
JPS641854B2 (enrdf_load_stackoverflow
Inventor
Junichi Inaba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56049853A priority Critical patent/JPS57164438A/ja
Publication of JPS57164438A publication Critical patent/JPS57164438A/ja
Publication of JPS641854B2 publication Critical patent/JPS641854B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85—Coating a support with a magnetic layer by vapour deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP56049853A 1981-04-01 1981-04-01 Thin film forming device Granted JPS57164438A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56049853A JPS57164438A (en) 1981-04-01 1981-04-01 Thin film forming device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56049853A JPS57164438A (en) 1981-04-01 1981-04-01 Thin film forming device

Publications (2)

Publication Number Publication Date
JPS57164438A true JPS57164438A (en) 1982-10-09
JPS641854B2 JPS641854B2 (enrdf_load_stackoverflow) 1989-01-12

Family

ID=12842608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56049853A Granted JPS57164438A (en) 1981-04-01 1981-04-01 Thin film forming device

Country Status (1)

Country Link
JP (1) JPS57164438A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972655A (ja) * 1982-10-20 1984-04-24 Matsushita Electric Ind Co Ltd 磁気記録媒体の製造装置
US4847109A (en) * 1985-05-31 1989-07-11 Hitachi Maxell, Ltd. Method of a making magnetic recording medium
JPH01298523A (ja) * 1988-05-26 1989-12-01 Matsushita Electric Ind Co Ltd 磁気記録媒体の製造装置及び磁気記録媒体の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972655A (ja) * 1982-10-20 1984-04-24 Matsushita Electric Ind Co Ltd 磁気記録媒体の製造装置
US4847109A (en) * 1985-05-31 1989-07-11 Hitachi Maxell, Ltd. Method of a making magnetic recording medium
JPH01298523A (ja) * 1988-05-26 1989-12-01 Matsushita Electric Ind Co Ltd 磁気記録媒体の製造装置及び磁気記録媒体の製造方法

Also Published As

Publication number Publication date
JPS641854B2 (enrdf_load_stackoverflow) 1989-01-12

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